| 大视场双通道Micro⁃LED晶圆缺陷光学检测系统设计 |
| Design of a dual⁃channel optical inspection system with large field of view for Micro⁃LED wafer defects |
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| 中文摘要: |
| 为满足微型发光二极体（Micro Light Emitting Diode， Micro?LED）芯片制造过程中多种晶圆缺陷的高精度自动检测需求，设计了一种大视场偏振双通道Micro?LED晶圆缺陷自动光学检测系统。该系统将显微成像技术与偏振成像技术相结合，增强Micro?LED晶圆缺陷图像的对比度，提升检测准确性；通过无限共轭显微物镜和筒镜的组合使用，扩大单次曝光中采集到的晶圆样品图像面积，提高检测效率。开展实验验证大视场双通道Micro?LED晶圆缺陷光学检测系统的性能，结果表明：该系统放大倍率为20，照明均匀性可达91.6%，最大像方视场为33 mm；该系统的调制传递函数（Modulation Transfer Function， MTF）曲线在奈奎斯特频率31 lp / mm处接近衍射极限，可满足0.8 μm的物方分辨力；该系统测量得到的偏振度图像的信息熵、边缘强度、标准差和平均梯度相较传统灰度图像的平均提升率分别为25.6%、24.9%、33%、173.3%。大视场双通道Micro?LED晶圆缺陷光学检测系统可实时捕获不同类型缺陷的特征信息，具有识别效率高、漏检率低等优势，为Micro?LED晶圆生产质量高精度检测提供了有力支撑。 |
| 英文摘要: |
| In order to meet the demand for high?precision automatic detection of multiple wafer defects during the manufacturing process of micro light emitting diode (Micro?LED) chips, a large?field?of?view polarisation dual?channel Micro?LED wafer defects automatic optical inspection system has been designed. The system integrates microscopic imaging technology with polarisation imaging technology, thereby enhancing the contrast of Micro?LED wafer defect images and enhancing the detection accuracy. The system utilises infinite conjugate microscopic objectives and barrel lenses, which expand the image area of wafer samples captured in a single exposure and improve the detection efficiency. Experiments have been conducted to verify the performance of the large?field?of?view dual?channel Micro?LED wafer defect optical inspection system, and the results demonstrate that: the system's magnification is 20, the illumination uniformity is up to 91.6%, and the maximum image field?of?view is 33 mm; The modulation transfer function (MTF) curve of the system is close to the diffraction limit at the Nyquist frequency of 31 lp / mm, which can satisfy the object resolving power of 0.8 μm. The system has been shown to enhance the information entropy, edge intensity, standard deviation and average gradient of polarimetric images in comparison to traditional grey?scale images by 25.6%, 24.9%, 33% and 173.3%, respectively. The large?field?of?view dual?channel Micro?LED wafer defect optical inspection system has been demonstrated to capture the characteristic information of different types of defects in real time, with high recognition efficiency, low missed detection rate and other advantages, providing a strong support for the high?precision inspection of Micro?LED wafer production quality. |
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| 中文关键词: 微型发光二极体 缺陷检测 光学设计 偏振 |
| 英文关键词:Micro⁃LED defect detection optical design polarization |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2025.02.06 |
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