Micro-mass sensors can be used for the detection of poisonous gases and nanoparticles, which are widely used in environmental detection, medical diagnosis and other fields. In the past few years, micro-mass sensors based on graphene materials have been extensively studied because of their large surface area to volume ratio, low electronic noise, and excellent adsorption. This article focuses on a kind of ultra-high-sensitivity graphene micro-mass sensor based on the principle of resonance, focusing on the structure of graphene resonators, vibration pick-up schemes, quality sensitivity characteristics and other issues, and summarizes the graphene resonance micro-mass detection progress and challenges. |