| 扫描电子显微镜校准方法探讨 |
| Discussion on Scanning Electron Microscopy Calibration Method |
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| 中文摘要: |
| 扫描电子显微镜是纳米几何尺寸测量的一种重要工具。本文对扫描电镜现有的检定规程进行评述，分析了可用的标准器现状及各参数校准的可行性。结合国内已开展的工作对扫描电镜放大倍数误差、放大倍数重复性、XY方向图像线性失真度计量特性的实际校准方法进行探讨。对扫描电镜国家计量技术规范的修订工作提出建议。 |
| 英文摘要: |
| Scanning Electron Microscopy is an important tool in measurement of nanometer dimensions. The existing verification regulations of Scanning Electron Microscopy are commented in this paper and current situation of standards and feasibility in calibration are analyzed. Based on the authors’ domestic work, the actual calibration method of Scanning Electron Microscopy in magnification times error, repeatability and image linear distortion in X and Y directions are discussed. Proposals are offered in revision of metrology technical specifications of Scanning Electron Microscopy. |
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| 中文关键词: 扫描电子显微镜 标准器 计量特性 校准方法 |
| 英文关键词:scanning electron microscopy standard metrological characteristics calibration method |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2015.06.11 |
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