| 恒压式气体微流量计测量不确定度评估 |
| Uncertainty Evaluation of Constant Pressure Gas Micro-flowmeter |
| Received:September 27, 2005 Revised:January 10, 2006 |
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| 中文摘要: |
| 介绍了恒压式气体微流量计的组成和校准原理.在对电容薄膜规做了热流逸效应实验的基础上,对流量计的测量不确定度进行了评估,给出了扩展不确定度和包含因子.通过传递标准漏孔与德国PTB开展了漏率比对,验证了测量不确定度评估结果的可靠性. |
| 英文摘要: |
| The structure and calibration theory of a constant pressure gas micro-flowmeter are introduced.On the basis of thermal transpiration effect experiments of capacitance diaphragm gauge(CDG), the uncertainties of constant pressure gas micro-flowmeter are strictly evaluated.And the expanded uncertainties and coverage factors are also given.Through the leak-rate comparison with PTB using standard leak,the reliability of uncertainty evaluation results has been verified. |
| 冯焱 成永军 张涤新 |
| 兰州物理研究所,甘肃兰州730000 |
| 中文关键词: 恒压 气体微流量计 测量不确定度 评估 |
| 英文关键词:constant pressure gas micro-flowmeter uncertainty of measurement evaluation |
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