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氪气和氙气中四氟化碳杂质分析
CF4 Impurity Analysis in Krypton Gas and Xenon Gas
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中文摘要
:
介绍了CF4定性定量分析方法,探讨了CF4的来源及清除.
英文摘要
:
In this article, the qualitative and quantitative analysis of CF4 are introduced, as well as the source and elimination of CF4 are discussed.
温舜德
邓立新
武钢氧气有限责任公司,湖北,武汉,430083
中文关键词
:
氪气 氙气 CF4 分析
英文关键词
:
krypton gas
xenon gas
CF1
analysis
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DOI:
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