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    分压力质谱计校准装置的不确定度分析
    Uncertainty Analysis of Calibration System of Mass Spectrometers for Partial Pressure
      Revised:June 24, 2002
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    中文摘要:
          介绍了分压力质谱计校准装置的结构，工作原理及分压力测量方法，对分压力测量和灵敏度校准的不确定度进行了分析。
    英文摘要:
          The construction of the calibration system of mass spectrometers for partial pressure,its principle and measurement methods also are introduced.In addition, the uncertainty analysis of partial pressure measurement and sensitivity calibration are presented.
    冯焱  李得天  张涤新  张建军
    兰州物理研究所 甘肃兰州730000 (冯焱，李得天，张涤新)
    ，兰州物理研究所 甘肃兰州730000(张建军)
    中文关键词:  分压力 质谱计 校准装置 不确定度
    英文关键词:partial pressure,mass spectrometer,calibration,uncertainty
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