Special issue

1 Research on high-temperature dynamic strain measurement technology for hot-section components using optical fiber sensing

CHEN Shuang , SUI Guanghui , ZHANG Xinying , ZHANG Penghao , HUANG Caixia

2026, 46(2):109-119. DOI: 10.11823/j.issn.1674-5795.2026.02.09

[Abstract](74) [HTML](119) [PDF 7.99 M](70)

Abstract:
To accurately measure the high-temperature dynamic strain of hot-section components of aero-engines, this paper systematically investigates a high-temperature dynamic strain measurement method based on fiber optic sensing technology. High-temperature-resistant grating structures, inscribed using femtosecond lasers, were installed and fabricated on the substrate surface via plasma spraying technology. The performance of the sensors was tested and evaluated using high-temperature static and dynamic strain calibration rigs that simulate the operating conditions of hot-section components. Finally, validation was conducted through two aero-engine test rig experiments. The results from disk rig tests designed to assess high-temperature endurance and measurement accuracy demonstrated that the sensors could withstand environments up to 650 ℃, with a deviation of less than 5% between measured centrifugal strain and design simulations. The results from high- and low-cycle fatigue rig tests designed to verify dynamic strain measurement capabilities under blade vibration loads indicated a discrepancy of approximately 1.3% between measured and theoretical resonance frequencies, while the dynamic strain amplitudes were consistent with the predicted design magnitudes. The high-temperature dynamic strain measurement method based on fiber optic sensing technology provides important technical support for accurately assessing stress distribution and fatigue life of hot-section components in aero-engines and identifying danger points in advance.

2 Thin film strain sensor manufactured by integrated forming on hydraulic pipeline

LUO Guoxi , ZHANG Yuzhuo , JIA Zeng , LI Wenyan , ZHAO Libo

2025, 45(5):79-89. DOI: 10.11823/j.issn.1674-5795.2025.05.08

[Abstract](204) [HTML](116) [PDF 20.63 M](373)

Abstract:
Traditional strain gauges face challenges such as significant strain transfer errors and slow response during monitoring, severely limiting the engineering effectiveness. To addresses the monitoring requirements for strain, vibration, and clamp looseness in aviation hydraulic pipelines, this paper proposed a design and manufacturing method for in-situ preparation of thin-film strain sensors on hydraulic pipelines. A finite element analysis model for strain transfer errors was established, and the structural parameters of the resistive strain grating were optimized. Multi-layer hetero-thin films, including the Ni80Cr20 strain-sensitive layer, were prepared using magnetron sputtering technology. Through a five-axis laser etching process, the laser incidence angle and focal position were adjusted in real-time, achieving a high-precision control over the etching depth. Testing revealed that the prepared thin-film strain sensor exhibited a drift rate (DR) of 8.4 × 10^-5 h^-1, a temperature coefficient of resistance (TCR) of 1.3 × 10^-4 ℃^-1 in the range of -40 ~ 100 ℃, a gauge factor (GF) of 2.03 in the strain range of 0 ~ 500 με, and a response time of just 15 ns. Force hammer experiments confirmed the sensor's ability to detect and identify key information such as strain, vibration, and clamp tightness. This integrated manufacturing sensor holds promising applications in the field of aviation hydraulic pipeline condition monitoring.

3 Fatigue testing and life prediction modeling of silicon-based piezoresistive pressure sensors

SHEN Chen , CHEN Xiaosong , SHI Bo

2026, 46(3):52-64. DOI: 10.11823/j.issn.1674-5795.2026.03.07

[Abstract](61) [HTML](57) [PDF 9.99 M](53)

Abstract:
Silicon-based piezoresistive pressure sensors suffer from insufficient reliability and reduced service life due to issues such as output drift and sensitivity degradation in harsh environments. This study aims to systematically elucidate the physical mechanisms of stability degradation and to develop a high-precision life prediction model. Utilizing the failure physics analysis theory, it adopted variable-amplitude cyclic loading and accelerated fatigue testing methods to conduct accelerated tests by applying alternating pressure with different amplitudes. It established a dataset of sensor failure degradation through microscopic examination and performance monitoring, and overcame the challenge of analyzing the coupled effects of multiple mechanisms, including diaphragm cracking, piezoresistor creep, and packaging stress failure, ultimately constructed a life prediction model under uniaxial pressure loading conditions. Accelerated life testing demonstrated that under a pressure load of 140% of the full-scale range, the sensor's linearity increased by over 50% after approximately 2.2 million cycles, which is defined as failure. The developed model achieved an error of less than 15% between the predicted and measured lifespan, enabling effective prediction of the sensor's failure cycle. This study holds significant theoretical and practical application value, providing crucial support for advancing the design optimization and lifetime prediction of highly reliable silicon-based pressure sensors.

4 Life prediction method for MEMS sensors integrating physics of failure and virtual testing

YU Zixuan

2026, 46(3):42-51. DOI: 10.11823/j.issn.1674-5795.2026.03.06

[Abstract](53) [HTML](128) [PDF 1.24 M](52)

Abstract:
Aiming at the problems of high acceleration test cost and the lack of systematic modeling and uncertainty quantification in existing virtual methods for the life verification of high-reliability MEMS sensor complete machines, this paper proposes a virtual assessment framework based on Physics of Failure (PoF). This method obtains local stress through multi-scale digital prototyping and thermal-vibration coupling simulation, and constructs a modular PoF model library to predict the life of key failure modes of critical devices. To quantify the uncertainty in manufacturing processes and service environments, a physical source-driven hybrid probability distribution modeling strategy is introduced. On this basis, a two-level competitive failure model consisting of "intra-device multi-mode fusion" and "inter-device first-passage failure" is established to realize the prediction of the Time-to-Failure (TTF) of the complete machine. Taking the MPU9250 as an example for verification, the independently conducted thermal-vibration combined physical test shows that the digital prototype has satisfactory accuracy (case temperature deviation shall not exceed ± 0.2℃, modal error < 5%), the predicted TTF of the complete machine is 12 721 h, and the weak link is accurately identified. The results show that the proposed method can effectively reduce the dependence on physical tests and improve the efficiency and credibility of life assessment.

5 Study on natural environmental test methods for metrological performance of airborne sensors

SHI Chunying , ZHANG Yixiang , HU Wanxin , XING Runjia

2025, 45(6):128-140. DOI: 10.11823/j.issn.1674-5795.2025.06.11

[Abstract](155) [HTML](107) [PDF 928.39 K](220)

Abstract:
To accurately evaluate the metrological performance of airborne sensors under the prolonged, gradual, and cumulative influence of the natural environment, this study examines key technical aspects of the testing process — including preliminary preparations, test design, execution, result analysis, and reporting — based on the characteristics of both airborne sensors and natural environments. This exploration has resulted in the development of a relatively universal methodology for conducting natural environmental tests. These tests generate fundamental data on the changes in sensor metrological indicators, providing essential support for subsequent research on the performance degradation and the calibration cycle of airborne sensors.

6 Research on the influence of Ni content and film thickness on the environmental stability of PdNi hydrogen sensors

ZHANG Yu , YANG Hongwei , LIU Fang , YANG Wengang , JIANG Hongchuan , DENG Xinwu

2025, 45(6):73-85. DOI: 10.11823/j.issn.1674-5795.2025.06.06

[Abstract](172) [HTML](139) [PDF 18.41 M](315)

Abstract:
O? and H?O significantly affect the hydrogen sensitivity of PdNi thin films. To monitor hydrogen concentration in high-humidity oxygen-containing environments such as electrolytic water hydrogen production, nuclear power plant storage, and deep-sea energy exploration, PdNi thin-film hydrogen sensors were fabricated using methods such as magnetron sputtering, photolithography, and plasma etching. By adjusting the Ni content and thickness of the PdNi thin films, the influence of Ni content and thickness on the stability of the PdNi thin-film hydrogen sensors under O? and H?O interference was systematically studied. Analytical methods such as XRD, SEM, and XPS were employed to characterize the crystallinity, elemental content, and elemental valence states of the PdNi thin films. The experimental results indicate that as the Ni content increases, the hydrogen response of the PdNi thin films becomes more affected by H?O and O?, while increasing the film thickness can reduce interference but weakens the hydrogen response sensitivity. Among them, the PdNi thin-film hydrogen sensor with a Ni content of 8.04% and a thickness of 24 nm, although affected by O? and H?O, can restore its response curve to the initial state after experiencing interference. This research provides important support for the development of the hydrogen sensor for applications under complex environment conditions.

7 Pressure sensor chip fabrication and optimization for traction and braking systems in high-speed trains with speeds of 350 km / h and above

ZHENG Dezhi , DONG Xiaoyuan , CHEN Aobei , SUN Ying , HU Chun , WANG Shuai

2025, 45(5):108-117. DOI: 10.11823/j.issn.1674-5795.2025.05.11

[Abstract](187) [HTML](77) [PDF 9.72 M](361)

Abstract:
To meet the stringent requirements for high accuracy, wide dynamic range, and rapid response of pressure sensors under the complex operating conditions of high-speed train traction and braking systems, this study presents the design, fabrication, and multiphysics optimization of a high-performance piezoresistive pressure sensor chip. By emplo-ying multiphysics coupling modeling theory in combination with a structural parameter optimization approach, this study systematically investigates the synergistic influence of diaphragm thickness, piezoresistor layout, and doping concentration on sensor performance, and proposes a parameterization-based stiffness-sensitivity co-optimization strategy for the diaphragm. Furthermore, by developing an eight-mask photolithography process and a composite wet etching technique based on KOH / IPA, a submicron-level control accuracy of diaphragm thickness was achieved. Finite element simulation results demonstrate a sensitivity of 56.987 mV / kPa, a nonlinearity of 0.048% FS, and structural stability under 300% overpressure. This work addresses a key technological bottleneck in high-accuracy pressure sensor fabrication and lays the foundation for fully localized production of safety-critical sensing components in next-generation traction systems for high-speed train.

8 Advances in high-temperature gas sensing techniques using laser dispersion spectroscopy

ZHOU Chen , GUO Shuang , MA Liuhao

2025, 45(4):119-140. DOI: 10.11823/j.issn.1674-5795.2025.04.09

[Abstract](322) [HTML](134) [PDF 19.84 M](463)

Abstract:
LDS is an advanced laser-based spectroscopic technique for gas sensing with a broad dynamic range and high immunity to optical power fluctuations. It has attracted considerable attention in trace gas detection and combustion diagnostics. Starting from the motivation for conducting research on LDS technology, this review systematically introduces the fundamental spectroscopic principles of LDS and establishes a theoretical analysis framework. It highlights the key features and implementation methods of HPSDS and CLaDS, and explores approaches for constructing calibration-free models. By examining the representative LDS applications in the past decade in typical scenarios such as combustion diagnostics, high-temperature flue gas monitoring, and environmental optical trace gas detection, this review elucidates the distinct technical requirements of these application domains. Finally, regarding such challenges as the insufficient detection sensitivity and complex system configurations, the paper indicates the future development directions from both fundamental research and practical application perspectives, providing a systematic reference for advancing the theoretical foundations and engineering applications of LDS.

9 Controllable optomechanical coupling in chip-scale cavity optomechanical sensor resonator

LI Zhe , XIAN Chengwei , ZHANG Huaiying , KUANG Pengju , CHEN Kai , HUANG Yongjun

2025(2):88-94. DOI: 10.11823/j.issn.1674-5795.2025.02.09

[Abstract](521) [HTML](193) [PDF 2.52 M](802)

Abstract:
Cavity optomechanical sensors, as a focal point at the intersection of technology and science, are pivotal for improving sensing resolution across diverse applications. This research modulated the intracavity optical field mode volume by adjusting the optical fiber coupling state to achieve controllable optomechanical coupling, leading to a strong coupling lock state. Within a chip-scale optomechanical sensor resonator system constructed from two-dimensional photonic crystals, the study successfully demonstrated the enhancement of mechanical quality factor (Q-factor) and the suppression of system noise through controllable optomechanical coupling. Experimental results indicate that in the strong optomechanical coupling lock state, the mechanical Q-factor is increased by approximately 10 times compared to the weak coupling state, and system noise is significantly reduced by about 26 dB. Moreover, the optomechanical accelerometer sensor, based on this scheme, is achieves a sensitivity of 126.58 mV / g under a 6 kHz acceleration drive. This study not only validates the potential of controllable optomechanical coupling in enhancing mechanical Q-factor and reducing system noise, but also offers new perspectives for the design and application of optomechanical systems, significantly advancing the development in photonic and micro-nano mechanical systems.

10 Review of the development trends of dew point temperature sensors

NIE Jing , LIU Xi

2024(1). DOI: 10.11823/j.issn.1674-5795.2024.01.04

[Abstract](1036) [HTML](271) [PDF 1.45 M](2668)

Abstract:
Introducing the current research status in the field of dew-point temperature sensors, and expounding the principles and structures of optical, resonant, electrical, thermal, weight and chemical dew-point temperature sensors. It is pointed out that the optical dew point temperature sensor has high measurement accuracy, and the cold mirror dew point sensor can be used as the humidity measurement standard. The resonant dew point temperature sensor has the characteristics of small size, low cost, short response time, high sensitivity and good reliability. The electrical dew point temperature sensor has high sensitivity and low power consumption, which is convenient for miniaturization and integration. Gravimetric method is the most accurate absolute humidity measurement method and the basis for establishing humidity benchmark. Chemical methods are often used to measure organic gas mixtures in low humidity. The application of dew point temperature sensor in environmental monitoring, industrial manufacturing, medical diagnosis and other fields is discussed. It is pointed out that dew point temperature sensors will develop towards high precision, high stability and high response in the future, and their application range will be further expanded to meet the measurement needs in extreme environments.

11 Dynamic extraction method for natural frequency of single-probe blade based tip timing signal

HU Huahui , YANG Zhibo , JIN Ruochen , YANG Laihao , TIAN Shaohua

2024, 44(5). DOI: 10.11823/j.issn.1674-5795.2024.05.02

[Abstract](481) [HTML](202) [PDF 5.41 M](661)

Abstract:
To address the under-sampling issue in blade tip-timing signals and overcome probe limitations, a novel method for extracting blade natural frequencies using single-sensor measurement data is proposed. By constructing multiple virtual signals to frequency-shift the measured signal, the frequency components of dynamically varying signals are extracted, and the natural frequency information of the blades is retrieved in conjunction with prior knowledge. Simulation and experimental results validated the effectiveness and accuracy of this method in natural frequency extraction, and also demonstrated the potential for processing small-sample data. This approach uses only a single blade tip-timing probe, overcoming the restrictions in probe placement. With the minimum number of probes, it resolves the frequency aliasing caused by under-sampling, offering the promising technical support for online monitoring of rotor blades in aero-engines.

12 Study on suppression method for the effect of water viscosity in QCM dew point sensor

GU Rongrui , WANG Zhongyu , BAI Xuesong , WANG Guohua , NIE Jing

2023(6). DOI: 10.11823/j.issn.1674-5795.2023.06.03

[Abstract](856) [HTML](247) [PDF 11.28 M](818)

Abstract:
In active temperature-controlled dew point measurement based on a quartz crystal microbalance (QCM), the viscoelastic property of liquid water leads to a frequency dissipation which has an effect on the detection accuracy of dew point. Here, the QCM electrode was modified by hydrophobic treatment to improve the condensation form, minimize the dissipation attributed to the water viscosity, and achieve the measurement of resonance frequency offset caused by changes in liquid water quality. A hydrophobic layer with a static water contact angle of 133° ± 2° was prepared on the QCM electrode and characterized. The hydrophobic electrode and untreated electrode were applied in the dew point recognition experiments, and compared with the standard dew point obtained by a precision dew point meter. The experiments proved that the hydrophobic treatment of the electrode surface can effectively improve the dew point recognition accuracy of the QCM sensor. The optimal approach can provide basis for the design of dew point sensor structure with active temperature control.

13 Research on automatic calibration system for temperature and pressure sensors in atmospheric environment

LI Qiang , WANG Jianhang , HU Chun

2023(6). DOI: 10.11823/j.issn.1674-5795.2023.06.09

[Abstract](669) [HTML](276) [PDF 11.51 M](826)

Abstract:
Currently, the testing and calibration of atmospheric environmental sensors heavily rely on manual operations, resulting in low efficiency and poor accuracy. To address this issue, the working principles of atmospheric environmental sensors was analyzed. Based on this, a hardware testing platform for atmospheric environmental sensors was established. It consists of vacuum pump motor, pressure controller, high and low-temperature chambers, metallic sealed chamber, standard digital thermometer, industrial computer, and the atmospheric environmental sensors to be calibrated. Additionally, an automated software testing system for atmospheric environmental conditions was designed. Controlled by an industrial computer, this system periodically samples standard environmental parameters, automatically determines stability, and records calibration parameters to fit calibration curves. Automated calibration tests were performed on temperature and pressure sensors, yielding fitting correlation coefficients of 0.994 5 and 0.996, with repeatability errors of 0.087% and 0.046%, respectively. The results validate the feasibility of the testing system. This research provides robust support for the rapid deployment of atmospheric environmental sensors and holds significant implications for advancing the application of automation technology in the measurement of atmospheric environmental parameters.

14 A temperature compensation model for QCM humidity sensor in high temperature environment based on deep learning

FENG Junyi , CUI Jianmin , WEN Lianpeng , WANG Guohua , NIE Jing

2023(5). DOI: 10.11823/j.issn.1674-5795.2023.05.04

[Abstract](1005) [HTML](276) [PDF 2.88 M](1482)

Abstract:
To reduce the impact of temperature drift on sensor measurement results in high temperature and low humidity environments, a humidity sensor based on quartz crystal microbalance (QCM) was developed by using a quartz crystal with a fundamental frequency of 4 MHz as a substrate and depositing graphene oxide (GO) on the substrate using a drop-on-demand method. The temperature drift phenomenon of AT-cut quartz crystal wafers and graphene oxide materials in high temperature environments is significant, resulting in frequency output drift of the sensor. Therefore, a deep-learning method was used to correct the temperature drift. The adaptability of the back propagation (BP) neural network correction model to the QCM humidity sensor was tested under different absolute humidity conditions. The experimental results show that the correction model obtained through deep learning can effectively improve the sensitivity, stability, and response speed of the QCM humidity sensor. It is of great significance for studying the frequency correction technology of QCM humidity sensors under temperature and humidity coupling conditions.

15 Research progress on flexible wearable piezoelectric ultrasound transducers

ZHANG Min , XIU Kunhao , SUN Jingyao , WANG Ziying , ZHAO Libin

2024, 44(3). DOI: 10.11823/j.issn.1674-5795.2024.03.05

[Abstract](1021) [HTML](275) [PDF 6.97 M](3367)

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The structural design and material selection of the piezoelectric layer, backing layer, matching layer, encapsulation layer, and interconnecting electrodes of flexible wearable piezoelectric ultrasound transducers are introduced, the advantages of the simulation design of the transducers using finite element analysis (FEA) technology are discussed, and key technologies in the transducers fabrication, such as electrode patterning, are described. The applications of this type of sensors in the fields of deep tissue imaging, haemodynamic monitoring, promoting the recovery of bone damage, and assisting transdermal drug delivery are analysed. The development direction of the sensors is outlooked, and it is pointed out that in the future, the measurement accuracy, safety and integration degree of flexible wearable piezoelectric ultrasound sensors can be further improved through the application of high-performance signal processing technology, improvement of ultrasound detection and imaging algorithm, and optimisation of the sensor structural design scheme, etc., so as to promote the marketable and industrial development of this kind of sensors.

16 Review of whispering-gallery-mode microcavity sensing

WEN Pengyu , LONG Guilu , WANG Min

2023(4). DOI: 10.11823/j.issn.1674-5795.2023.04.03

[Abstract](1058) [HTML](275) [PDF 5.81 M](4344)

Abstract:
The applications of whispering-gallery-mode microcavities in sensing research, including displacement sensing, force sensing, acceleration sensing, mass sensing, nanoparticle sensing, temperature sensing, angular velocity sensing and exceptional points enhanced sensing, in recent years have been reviewed. The basic theory of different sensing schemes and some related important experimental work are introduced, and the important factors that may help improve sensing accuracy are illustrated, which will provide reference for the following theoretical and experimental research.

17 Electric field sensing technology based on Rydberg atoms

CHEN Xuehua , CONG Nan , LUO Wenhao , ZHANG Xiaonan , WANG Yanhua , WEI Xiaogang , YANG Renfu

2023(4). DOI: 10.11823/j.issn.1674-5795.2023.04.06

[Abstract](1793) [HTML](392) [PDF 3.40 M](6612)

Abstract:
This article summarizes the basic principles of electric field sensing technology based on Rydberg atoms, and analyzes the advantages of Rydberg atomic electric field measurement, such as high sensitivity, broadband, traceability to the International System of Units (SI), and high spatial resolution. The effects of laser parameters, detector noise, environmental electromagnetic interference, and other factors on the sensitivity and frequency response bandwidth of Rydberg atomic field strength measurement were discussed. Methods to improve the sensitivity of field strength measurement, such as frequency modulation, re pumping, and parameter optimization, were introduced, and methods to enhance the frequency response bandwidth of measurement, such as single auxiliary field atomic heterodyne method and double auxiliary five level heterodyne method, were elaborated. Explored the application of Rydberg atomic electric field sensing technology in metrology, communication, radar, imaging, and other fields, and pointed out that the sensitivity of Rydberg atomic electric field measurement should be further improved by optimizing the atomic gas chamber structure, designing high-performance photodetectors, and improving the performance of optical cavities; We should conduct in-depth research on the sources of uncertainty in the measurement of the Rydberg atomic electric field, and conduct comprehensive testing and characterization of the Rydberg atomic sensor; The miniaturization and engineering design research of the Rydberg atomic electric field measurement related devices should be carried out to further improve the practical application performance of the Rydberg atomic electric field measurement technology.