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CHAI Yu, CHEN Dezhang, LI Dezhi, LYU Kaihang, LI Haopeng, DANG Chaoqun, JU Bingfeng, YANG Chen
2026,46(1):1-18 ,DOI: 10.11823/j.issn.1674-5795.2026.01.01
Abstract:
This paper introduces the fundamental working principles of scanning tunneling microscope (STM), addresses how it comprehensively fulfills the three core requirements of atomic-scale manufacturing —— "visualization", "precision measurement" and "fabrication feasibility"， and examines its pivotal role in revealing quantum phenomena and constructing artificial atomic structures. Studies highlight that STM's environmental adaptability, ultra-high spatial resolution, and ultra-high temporal resolution provide key experimental evidence for revealing novel mechanisms and effects in atomically precise manufacturing. STM, based on the unique quantum tunneling effect, performs precise measurements of physical properties (e.g., electronic and magnetic) in fabricated structures, and establishes quantitative structure-property relationships between fabrication parameters and device performance, thereby providing a critical basis for process optimization and quality assessment. The deep integration of STM atomic-scale manipulation capabilities with automated and high-throughput modules represents a critical strategy for breaking-through its efficiency bottleneck and propelling it into industrial applications. This technological convergence will propel atomic manufacturing from the precise fabrication of individual structures to the efficient and controllable manufacturing of complex functional devices. Future research needs to focus on developing in-situ STM measurement techniques that can simultaneously achieve femtosecond-level temporal resolution and sub-angstrom spatial resolution, as well as expanding the comprehensive physical property characterization capabilities of STM systems under complex multi-physical field coupling conditions, so as to provide technical support for the development of next-generation quantum materials and information devices.
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LI Zhijian, LIU Hao, WAN Chao, HAO Hao, ZHAO Qingyuan, MI Qinggai, ZHANG Lei, LI Cong, SUN Bo, MAO Litao, WANG Huabing, WU Tengfei
2026,46(1):19-32 ,DOI: 10.11823/j.issn.1674-5795.2026.01.02
Abstract:
This study addresses the photon count distortion under high count rates and difficult positioning under low Signal-to-Noise Ratio (SNR) condition in Four-Quadrant Superconducting Nanowire Single-Photon Detectors (QD-SNSPD) The nonlinear correction mechanism for photon counts is introduced and an analytical solution for Gaussian spot localization problem after correction is derived. A differential localization method using non-integer power operations is proposed, which increase signal differentiation between positive and negative semi-axes through an exponent
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CHEN Caixin, LI Sixuan, YAN Ming, ZENG Heping
2026,46(1):33-54 ,DOI: 10.11823/j.issn.1674-5795.2026.01.03
Abstract:
This paper introduces the fundamental principles and classifications of optical frequency combs, reviews the generation mechanisms and representative architectures of electro-optic frequency combs (EOFCs), and systematically summarizes implementation approaches and performance characteristics of EOFCs on emerging material platforms, including thin-film lithium niobate (TFLN) and silicon nitride (SiN), covering schemes based on Mach-Zehnder modulators, phase modulators and micro-resonator modulator. Methods for spectral extension of EOFCs are discussed, followed by an overview of EOFC applications in spectroscopy, precision ranging, and optical communications. Finally, future development directions are outlined, emphasizing that interdisciplinary integration and co-design can further reduce control complexity, noise sensitivity, and thermal drift, while improving accuracy, environmental robustness, and frequency-stabilization performance, thereby accelerating the practical deployment of EOFCs in precision ranging and coherent communications.
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ZHANG Yunrui, GAO Hao, LUO Bin, YU song
2026,46(1):55-62 ,DOI: 10.11823/j.issn.1674-5795.2026.01.04
Abstract:
In the process of ultra long span fiber frequency transmission, factors such as power attenuation and additional noise of active devices lead to weak frequency signal at the receiving end, which limits the signal detection resolution and sensitivity. To solve this problem, the research team proposed a dual-mixing time-delay detection of weak frequency signals enabled by local-oscillator optical enhancement. The weak carrier signal power was enhanced by a coherent laser, and the dual-mixing time-delay detection structure was used to improve the receiving sensitivity. At the same time, the high signal-to-noise ratio signal extraction was realized by combining with the balanced detection technology. The experimental results show that compared with the traditional intensity modulation / direct detection method, the dual-mixing time-delay detection of weak frequency signals enabled by local-oscillator optical enhancement can effectively improve the sensitivity of the receiver by about 10 dB, the RF power is increased by 25 dB under the same input power condition, and this method achieves excellent frequency stability, with Allen deviation of 2 × 10-13@1 s and 2.1 × 10-15@10 000 s, and stability of 3 × 10-17@1 s and 3 × 10-19@10 000 s under the condition of difference frequency of 10 kHz, which verifies the feasibility and significant advantages of the proposed method in high-precision optical fiber frequency transmission.
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ZHANG Qican, WU Zhoujie, WANG Yajun, LIU Yuankun
2026,46(1):63-82 ,DOI: 10.11823/j.issn.1674-5795.2026.01.05
Abstract:
This paper introduces the characteristics of structured-light-based three-dimensional (3D) measurement technology, including its non-contact nature, high accuracy, and high flexibility. It reviews the principles and recent research progress of fringe structured-light illumination techniques for 3D surface measurement in complex scenes, with particular emphasis on a series of studies conducted by our research group to improve measurement accuracy and efficiency. Application cases of fringe structured-light-based 3D measurement are analyzed in the areas such as large-scale fossil fault planes, high-dynamic-range workpieces, high-speed kinematic processes, and large-aperture and smooth optical components. The challenges faced by 3D surface measurement technology based on structured-light illumination are further discussed. It is pointed out that future advancements can be achieved through deep interdisciplinary integration, thereby further enhancing the accuracy and efficiency of fringe structured-light-based 3D measurement, overcoming existing technical bottlenecks, and enabling highly reliable and digitized 3D measurement in a wide range of extreme and complex environments.
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LIU Zihan, WANG Zeping, CHANG Bing, YAN Yingzhan, YAO Baicheng, TAN Teng
2026,46(1):83-104 ,DOI: 10.11823/j.issn.1674-5795.2026.01.06
Abstract:
This paper reviews the principles and distinctive features of optical frequency combs, and introduces the advantages of optical-frequency-comb-enabled laser ranging, including high accuracy, high measurement speed, and large detection range. The recent research progress of comb-based laser ranging methods is analyzed, covering time-of-flight method, dispersive interferometry method, frequency-modulated continuous wave method, and random-modulated continuous wave method. Finally, future prospects for optical-frequency-comb-based laser ranging are discussed. It is pointed out that by exploring new physical mechanisms for comb-based ranging we may further extend the measurement range, increase the update rate, and reduce system complexity; by developing new schemes for comb stabilization and flexible parameter control we can suppress noise and thus further improve measurement accuracy; and we can enhance practicality by establishing drift error monitoring and automatic calibration mechanisms across multiple time scales, as well as by integrating multi-parameter environmental sensing and an online refractive-index compensation chain.
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MA Long, LI Ying, HAO Jingtang, LIANG Kun, YIN Xutao, PEI Xin
2026,46(1):105-128 ,DOI: 10.11823/j.issn.1674-5795.2026.01.07
Abstract:
This paper introduces the advantages of white light interferometry, including non-contact operation, high precision, and strong adaptability. However, in practical measurements, interference signals are affected by light source instability, scanning nonlinearity, and environmental disturbances, leading to a significant increase in phase noise. The recent progress in the analysis and suppression of phase noise in white light interference signals is reviewed. Particular attention is given to a series of studies carried out by our research group, including the establishment of a multi-source noise analysis framework that incorporates random perturbations, dispersion errors, and vibrations, as well as noise suppression strategies. Finally, future research directions are discussed, emphasizing the need for deeper investigations into the formation mechanisms of phase noise, phase response characteristics, and coupling with system parameters. Multi-source noise modeling, adaptive optimization, and deep learning techniques can be applied to the analysis and suppression of phase noise in white-light interference signals, thereby advancing precision measurement technologies.
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CUI Hang, DENG Zhongwen, ZHANG Hengkang, WANG Shuzhen, SUN Haifeng, MENG Xiawei, ZHANG Shuwei, GONG Junyu, LI Xiaoping
2026,46(1):129-139 ,DOI: 10.11823/j.issn.1674-5795.2026.01.08
Abstract:
Traditional frequency modulated continuous wave (FMCW) laser ranging techniques are mostly implemented using tunable lasers or dual-light-source architectures. These systems are complex and difficult to engineer, and they suffer from error amplification in dynamic scenarios. To address these limitations, our research team proposed an FMCW laser ranging method based on electro-optic double-sideband (DSB) modulation. A frequency-stabilized laser and an electro-optic modulator are used to generate two oppositely swept frequency signals, which reduces the system size and mitigates dynamic errors. An all-phase fast Fourier transform (APFFT) algorithm was designed to achieve stable and reliable phase retrieval under highly dynamic and high-noise conditions. In addition, Kalman filtering was introduced to optimize dynamic state estimation and improve ranging stability. Experimental results show that, with a 20 m fiber link, the absolute distance measurement error of the proposed method does not exceed ± 20 μm. For a sinusoidally vibrating target with amplitude ≤ 500 nm and frequency ≤ 200 Hz, the relative displacement measurement error does not exceed ± 25 nm. These results verify the high reliability of the proposed method and provide strong support for promoting the engineering deployment of FMCW laser ranging technology.
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ZHANG Jinxu, YANG Yuetang, WU Guanhao
2026,46(1):140-146 ,DOI: 10.11823/j.issn.1674-5795.2026.01.09
Abstract:
Current full-field spectral-domain interferometry relies on wavelength or galvanometer scanning, which limits its ability to acquire full-field information in a single detection. To address this issue, this paper proposes a full-field spectral-domain interferometry technique based on a Digital Micromirror Device (DMD). By encoding the spatial light field distribution via the DMD, time-varying spectral signals corresponding to sequentially loaded masks are acquired, which are further decoded to obtain the amplitude response at each spatial pixel. Combined with the measurement algorithm, full-field information retrieval is achieved. Experimental results demonstrate that the proposed technique enables high-precision spectral interferometric distance measurement and spectroscopic ellipsometric film thickness measurement, while significantly improving full-field measurement efficiency. The DMD-based full-field spectral interferometry technique is suitable for rapid three-dimensional structure recovery and reconstruction of sparse surfaces, providing strong support for efficient thickness and topography characterization of polished wafers, Silicon-On-Insulator (SOI) substrates, and bonded interfaces.
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ZHAO Huijie, YANG Xu, LI Xiang, JIANG Hongzhi, LI Xudong
2026,46(1):147-159 ,DOI: 10.11823/j.issn.1674-5795.2026.01.10
Abstract:
Current domestic and international calibration specifications for structured light 3D measurement systems do not specify calibration methods for scenarios where the surfaces of measured objects are various non-diffuse reflective surfaces, and thus cannot fully meet the actual calibration needs. To address this issue, our research team analyzed the actual calibration scenarios of structured light 3D measurement systems, defined translucent surfaces, highly reflective surfaces and high dynamic range reflectivity surfaces from the perspective of optical properties, and designed standards applicable to different surfaces. In accordance with actual requirements, we formulated specific calibration methods, realizing the calibration of the capability of structured light 3D measurement systems to measure the geometric parameters of various non-diffuse reflective surfaces. The calibration method for structured light 3D measurement systems for various non-diffuse reflective surfaces proposed by our research team supplements and perfects the existing calibration methods for structured light 3D measurement systems, and plays an important role in promoting the development of structured light 3D measurement technology toward precision and standardization.
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LI Jie, ZHANG Chengyao, LIN Rongwei, LI Ruijun
2026,46(1):160-168 ,DOI: 10.11823/j.issn.1674-5795.2026.01.11
Abstract:
There is a lack of a universal and readily integrable online measurement and compensation scheme for six-degree-of-freedom (6-DOF) errors along the Z-axis of micro-nano coordinate measuring machines (CMMs). To address this challenge, this study introduces a synchronous measurement method for the axis of micro Z-axis linear and angular errors based on laser interferometry and autocollimation principles，and establishes a spatial error compensation model under Z-axis 6-DOF influence based on the Abbe principle and the Bryan principle. An in-situ and on-line Z-axis 6-DOF error measurement system based on the measurement method was developed and applied to a micro-nano CMM. Measurements were performed along the Z-axis on a grade 0 gauge block with a nominal thickness of 8 mm using the CMM. The results show that the measurement standard deviation and indication error are reduced by 54.6% and 54.3%, respectively, after compensation. This method, compensation model and the system provide a reliable solution for improving the measurement and machining accuracy of coordinate measuring machine(CMM) and other precision equipment.
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WANG Yiran, SHI Shendong, ZHAO Zesen, YANG Ruiqi, WANG Zibo, ZHU Jigui
2026,46(1):169-180 ,DOI: 10.11823/j.issn.1674-5795.2026.01.12
Abstract:
Changes in the beam incidence angle caused by variations in receiver orientation in a rotating laser scanning angle measurement system can introduce systematic angular measurement errors that affect the system's precision and robustness. To address this issue, a local projection model and a Gaussian light-strip distribution model were established based on beam propagation geometry and receiver structure characteristics, and differences in photoelectric response under different incidence conditions were analyzed. Furthermore, by incorporating attitude information provided by an Inertial Measurement Unit (IMU), an effective receiving surface model was constructed in the receiver coordinate system, and an error compensation method considering receiver structure features was proposed. Simulation results show that as the incidence angle increases, the photoelectric response waveform of the receiver becomes significantly asymmetric, with angular measurement errors reaching several tens of arcseconds. The proposed compensation method effectively corrected these errors, reducing the root-mean-square (RMS) error by approximately 90%. In precision turntable experiments, the roundness error of the receiver trajectory decreased from 0.81 mm before compensation to 0.17 mm after compensation, confirming the effectiveness of the compensation model. The study enriches the error modeling framework of rotational laser scanning systems, and provides an effective approach to enhance measurement accuracy and robustness under varying receiver attitudes.
Volume 46,2026 Issue 1
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Research on Data Processing Methods for Surface Temperature Field Measurement of Turbine Blades
Abstract:
In the design of thermal protection for aero engines and hot-end components such as engine blades, accurate measurement of surface temperature fields is critically important. Domestic mainstream multispectral algorithms have enabled temperature measurement in complex thermal environments, preventing the influence of internal engine background radiation on temperature measurement. However, traditional multispectral algorithms are computationally intensive and require SVD decomposition of spectral data to calculate temperature field data. Additionally, the accuracy of turbine blade positioning signals depends on simulated speed signals, which can result in positional deviations in temperature data. Without speed offset correction, the calculated temperature data cannot accurately reflect combustion temperature non-uniformity or design defects in the disks and blades. This paper innovatively proposes two core optimization strategies: first, the 'multispectral + monochromatic temperature auxiliary correction' strategy, which increases computational efficiency by over 30% compared to existing traditional multispectral optimization algorithms without compromising measurement accuracy; second, an adaptive speed offset correction algorithm that enables dynamic adaptive adjustment of filter parameters, improving offset correction accuracy by 15% compared to existing adaptive correction algorithms. It can handle complex multi-speed operating conditions and addresses the limitations of current temperature measurement algorithms in engineering applications.
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A virtual life prediction method for MEMS sensors integrating physics of failure and virtual testing
Abstract:
Aiming at the bottlenecks of high cost of accelerated tests and the lack of systematic modeling and uncertainty quantification in existing virtual methods for the whole machine life verification of high-reliability MEMS sensors, this paper proposes a high-confidence virtual evaluation method based on Physics of Failure (PoF). By obtaining local stress through multi-scale digital prototypes and thermal-vibration coupling simulation, a modular PoF model library is constructed to predict the single-point life; a hybrid probability distribution driven by physical sources is innovatively adopted to quantify manufacturing and environmental uncertainties; and the Time To Failure (TTF) of the whole machine is predicted based on the two-level mechanism of "multi-mode fusion within the device" and "first failure between devices". The prototype has been verified through a self-conducted combined thermal-vibration physical experiment using the MPU9250, demonstrating high accuracy (with a shell temperature deviation of ≤± 0.2℃and a modal error of <5%), with the whole machine Time To Failure (TTF) reaching 7961 h (about 1.82 years under 12 h daily operation), and accurate identification of weak links. The proposed method requires no large-scale physical tests, significantly improving evaluation efficiency and credibility.
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A Novel In-Situ Automatic Calibration Approach for Multi-Channel Temperature Scanning Valves
Abstract:
Temperature scanning valves are core equipment for multi-channel thermocouple temperature measurement in the aerospace field, and their calibration accuracy directly affects the accuracy and reliability of test data. Aiming at the problems of traditional calibration methods such as low efficiency, high cost, requirement for equipment disassembly and susceptibility to damage, a fully automatic in-situ calibration system for temperature scanning valves has been developed, which is based on scanning switches, high-precision standards and host computer programs. Through a dedicated metrological measurement structure, in-situ calibration without equipment disassembly is realized, completing the on-site fully automatic in-situ verification and calibration of temperature scanning valves. Systematic comparative experiments have been carried out on four types of key parameters: measurement time, data acquisition interval, two-point calibration standard value combination, and channel switching stabilization time. Based on a comprehensive evaluation of error statistics and time consumption indicators, the optimal parameter configuration balancing accuracy and efficiency is determined as follows: measurement time 8 s, data acquisition interval 250 ms, calibration standard values (10 mV, 40 mV), and channel switching stabilization time 3750 ms. Under this configuration, the single-channel verification time of the system is 11.75 s, the 32-channel verification time is 12.6 minutes, and the total time including preheating is 72.6 minutes. The measurement repeatability (standard deviation) is 0.0033 mV, and the equivalent temperature error is 0.083 ℃. Comparative verification with similar devices shows that the calibration efficiency of the system is improved by 13 times, while in-situ calibration and fully automatic execution are achieved. It provides a reliable technical scheme and parameter configuration basis for the engineering application of in-situ rapid verification/calibration of temperature scanning valves, and metrological support for on-site in-situ calibration of multi-channel thermocouple temperature measurement.
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Discharge-Enhanced Femtosecond Laser-Induced Plasma Spectroscopy
ZHU Zhifeng, LI Xiaofeng, GAO Qiang, LI Bo
Abstract:
This work presents a study on discharge-enhanced femtosecond laser-induced plasma spectroscopy. The results indicate that the discharge significantly enhances the spectral line intensities. At 7 kV, the intensities of the three spectral lines (Cu II 521 nm, Cu II 578 nm, and Cu I 793 nm) are enhanced by factors of 22, 31, and 36, respectively, compared to those without discharge. Different spectral lines exhibit distinct responses to the applied voltage. Time-resolved spectral analysis reveals that the discharge-induced enhancement primarily originates from the prolongation of the plasma fluorescence lifetime. This study provides a reference for the development of highly sensitive and stable plasma spectroscopic analysis techniques.
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Multi-System Cooperative Precision Measurement Technology and Platform for Large-Scale Complex Structure Assembly
HOU Guoyi, 赵子越, LI Runrun, SUN Anbin, LI Shuanggao, 黄翔
Abstract:
In response to the pressing demands for high-precision and batch assembly of large-scale complex structures in next-generation aircraft, this study addresses key bottlenecks in traditional digital measurement, such as inefficient measurement field construction, poor multi-equipment coordination, and the absence of an integrated cooperative measurement platform. Research on multi-system cooperative precision measurement technology has been carried out. An uncertainty propagation model for large-scale measurement fields and an adaptive planning method were established, and a multi-mode benchmark transformation standard device was developed, significantly improving the accuracy of cooperative measurement field construction. A measurement planning technique based on streamlined modeling and task-equipment coordination was proposed, supporting automated generation and simulation optimization of multi-station and multi-task sequences. Furthermore, a multi-system cooperative precision measurement platform for large-scale complex structure assembly was developed, integrating multi-equipment control, measurement planning, data management, and analysis. This platform achieves closed-loop control over the assembly measurement process encompassing "modeling–planning–measurement–analysis," leading to significant enhancements in both measurement accuracy and efficiency.
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Research on Spherical Collimator Frequency Sweeping Laser Interferometry for Distance Measurement in Accelerator Alignment
ZHANG Luyan, 张福民, MEN Lingling
Abstract:
The frequency sweeping interferometer enables high-precision absolute distance measurement over large scales, demonstrating significant research and application value in the field of accelerator alignment, where stringent requirements for measurement accuracy, stability, and environmental adaptability are imposed. A frequency sweeping interferometer system incorporating an HCN (H13C14N) gas absorption cell and an optical switch was developed to achieve multi-channel laser ranging functionality. Since laser trackers are widely used for equipment calibration and installation during accelerator alignment, a spherical collimator compatible with the target mount of laser tracker retroreflectors was designed. To validate system performance, distance measurement accuracy tests were conducted in an experimental environment simulating accelerator alignment. The results indicate that the designed system meets accelerator alignment requirements, with a ranging error not exceeding 30 μm within a 30?m measurement range. This system provides a high-precision, highly adaptable measurement solution for accelerator alignment, offering substantial practical engineering significance.
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Time delay estimation method of ultrasonic thickness measurement signal based on fuzzy variable step size LMS
Abstract:
Accurate acquisition of time of flight (TOF) is essential for high-precision ultrasonic thickness measurement. A time delay estimation method for ultrasonic thickness measurement signal based on fuzzy variable-step least mean square (LMS) was proposed, addressing the issues that the inherent contradiction between the convergence speed and the steady-state error of the fixed-step LMS algorithm in the traditional ultrasonic signal time delay estimation, and the poor adaptability of the existing variable-step algorithm under non-stationary echo signals due to the dependence on the fixed function model. The time-varying characteristics of ultrasonic echo signal were analyzed, and the single error feedback mechanism was abandoned. The local correlation coefficient error and its variation between the output signal and the desired signal were extracted as the dual input characteristics of the fuzzy controller. The zero-order Sugeno fuzzy inference system was designed, and the nonlinear mapping rule between the input feature and the step size factor was established to realize the adaptive dynamic adjustment of the step size factor. The simulated echo signals were used to carry out simulation tests under different signal-to-noise ratios. The results show that compared with the fixed step size LMS algorithm, the hyperbolic tangent function variable step size LMS algorithm and the fuzzy variable step size LMS algorithm based on instantaneous error, the comprehensive performance of the proposed method is better. The steady-state offset error is significantly reduced while ensuring rapid convergence, with higher measurement accuracy and anti-noise performance. The experimental platform of ultrasonic thickness measurement was built, and the thickness measurement experiments were performed on gauge blocks. The results show that the relative errors of the proposed method for different thickness gauge blocks are all smaller than that of the other three LMS algorithms, and the maximum relative error is 0.71 %. The fuzzy variable step size LMS time delay estimation method can provide feasible scheme selection and technical support for high-precision ultrasonic TOF calculation, which is conducive to promoting the development of ultrasonic nondestructive testing technology and has certain engineering application value.
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Optimization Algorithm for the Deployment of Heterogeneous Nodes in Energy-Isoform Sensor Networks
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The wireless sensor network is a crucial component of the Internet of Things (IoT), and ensuring its efficient operation has become one of the prominent research challenges today. By incorporating energy-replenishable heterogeneous nodes into the network, it is possible to effectively extend the network's lifespan. This paper establishes criteria for selecting the locations of heterogeneous nodes based on characteristics such as network coverage and data transmission distance. We propose an optimization deployment algorithm specifically designed for positioning heterogeneous nodes within heterogeneous wireless sensor networks, and we conduct a simulation analysis comparing our proposed algorithm with existing methods. The results indicate that our proposed algorithm demonstrates superior performance in terms of data transmission volume and energy consumption.
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