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  • 1  Design of a dual-channel optical inspection system with large field of view for Micro-LED wafer defects
    ZHANG Yibo HE Wenjun HONG Huimin
    2025, 45(2):56-67. DOI: 10.11823/j.issn.1674-5795.2025.02.06
    [Abstract](626) [HTML](213) [PDF 20.76 M](774)
    Abstract:
    In order to meet the demand for high-precision automatic detection of multiple wafer defects during the manufacturing process of micro light emitting diode (Micro-LED) chips, a large-field-of-view polarisation dual-channel Micro-LED wafer defects automatic optical inspection system has been designed. The system integrates microscopic imaging technology with polarisation imaging technology, thereby enhancing the contrast of Micro-LED wafer defect images and enhancing the detection accuracy. The system utilises infinite conjugate microscopic objectives and barrel lenses, which expand the image area of wafer samples captured in a single exposure and improve the detection efficiency. Experiments have been conducted to verify the performance of the large-field-of-view dual-channel Micro-LED wafer defect optical inspection system, and the results demonstrate that: the system's magnification is 20, the illumination uniformity is up to 91.6%, and the maximum image field-of-view is 33 mm; The modulation transfer function (MTF) curve of the system is close to the diffraction limit at the Nyquist frequency of 31 lp / mm, which can satisfy the object resolving power of 0.8 μm. The system has been shown to enhance the information entropy, edge intensity, standard deviation and average gradient of polarimetric images in comparison to traditional grey-scale images by 25.6%, 24.9%, 33% and 173.3%, respectively. The large-field-of-view dual-channel Micro-LED wafer defect optical inspection system has been demonstrated to capture the characteristic information of different types of defects in real time, with high recognition efficiency, low missed detection rate and other advantages, providing a strong support for the high-precision inspection of Micro-LED wafer production quality.
    2  Controllable optomechanical coupling in chip-scale cavity optomechanical sensor resonator
    LI Zhe XIAN Chengwei ZHANG Huaiying KUANG Pengju CHEN Kai HUANG Yongjun
    2025(2):88-94. DOI: 10.11823/j.issn.1674-5795.2025.02.09
    [Abstract](521) [HTML](193) [PDF 2.52 M](802)
    Abstract:
    Cavity optomechanical sensors, as a focal point at the intersection of technology and science, are pivotal for improving sensing resolution across diverse applications. This research modulated the intracavity optical field mode volume by adjusting the optical fiber coupling state to achieve controllable optomechanical coupling, leading to a strong coupling lock state. Within a chip-scale optomechanical sensor resonator system constructed from two-dimensional photonic crystals, the study successfully demonstrated the enhancement of mechanical quality factor (Q-factor) and the suppression of system noise through controllable optomechanical coupling. Experimental results indicate that in the strong optomechanical coupling lock state, the mechanical Q-factor is increased by approximately 10 times compared to the weak coupling state, and system noise is significantly reduced by about 26 dB. Moreover, the optomechanical accelerometer sensor, based on this scheme, is achieves a sensitivity of 126.58 mV / g under a 6 kHz acceleration drive. This study not only validates the potential of controllable optomechanical coupling in enhancing mechanical Q-factor and reducing system noise, but also offers new perspectives for the design and application of optomechanical systems, significantly advancing the development in photonic and micro-nano mechanical systems.
    3  Research progress review on single-photon imaging technology
    WANG Qin ZHAO Duohan CAO Lu XU Shaofeng LIU Jianing LI Jian
    2025, 45(3):7-27. DOI: 10.11823/j.issn.1674-5795.2025.03.01
    [Abstract](926) [HTML](253) [PDF 34.88 M](1122)
    Abstract:
    The fundamental principles of single-photon imaging technology are introduced, along with an analysis of its advantages of high sensitivity, high temporal resolution and high photon utilization efficiency. The technical characteri-stics of single-point scanning and multi-pixel single-photon imaging are elaborated, with discussions on their applications in scenarios such as long-range imaging, underwater imaging, and imaging in complex environments. Principles of traditional single-photon imaging algorithms and deep learning-based algorithms are presented, followed by a comparative analysis of their application effects under conditions of sparse echoes, strong noise and multi-peak signals. The outlook for the future development of single-photon imaging technology is proposed, highlighting that innovative hardware systems, optimized imaging algorithms and interdisciplinary technology integration will further advance the field toward higher accuracy, efficiency and intelligence.
    4  Element positioning error analysis of a Littrow grating interferometer
    ZHAO Jinhui HU Yuan
    2025, 45(3):37-44. DOI: 10.11823/j.issn.1674-5795.2025.03.03
    [Abstract](465) [HTML](158) [PDF 6.11 M](722)
    Abstract:
    Aiming at the lack of more in-depth quantitative data for the study of the systematic errors of Littrow-type grating interferometers, the systematic errors of Littrow-type grating interferometers caused by the positioning accuracy of the components, namely, the systematic errors of the interferometers caused by the additional optical path differences due to grating rotation around the x, y, and z axes as well as mirror rotation around the y axis, were investigated in terms of the impact of the systematic errors on the displacement measurements of the interferometers. A mathematical model of the error caused by the change in optical path difference when the grating and mirror rotate around the axes was established, quantitatively analyzed, and the accuracy of the mathematical model was verified by experiments. The results show that: when the grating and mirror rotate around the x and z axes, no additional optical path difference is generated; when the grating rotates around the y axis, the systematic error will be generated and increase with the increase of the grating constant and the rotation angle; when the mirror rotates around the y axis, the error will be generated only when the rotation angles of the two mirrors are different, and the error will increase with the increase of the rotation angle of the two mirrors. After synthesizing the errors of the whole system, the undefined system error is ± 3.12 μm in high assembly level, and ± 17.75 μm in general level, which verifies the correctness of the theoretical simulation, and provides technical reference and theoretical support for the system design of the Littrow-type grating interferometer.
    5  Design and implementation of high precision laser self-focusing control system
    WANG Jiangping ZHAO Chunbo ZHANG Yu MA Danni
    2025, 45(3):45-57. DOI: 10.11823/j.issn.1674-5795.2025.03.04
    [Abstract](478) [HTML](174) [PDF 10.78 M](733)
    Abstract:
    In laser ranging scenarios involving non-cooperative targets, the complex and diverse surface characteristics of these targets often result in low reflectivity and scattering of reflected light in various directions. Consequently, the optical energy returning to the measurement system is weak. To effectively collect the return optical energy and achieve precise focusing of the laser spot under such conditions, a high-precision laser zoom optical-mechanical system and auto-focusing control system have been designed. The optical structure of the system is optimized by incorporating a combination of collimating lens group, front lens group, movable lens group, rear lens group, and compensating lens group. This design ensures efficient beam focusing and maximizes energy, thereby enhancing the signal-to-noise ratio and stability across different ranging distances. Additionally, the focusing consistency of the system is improved by optimizing optical axis stability and mechanical structure layout. In terms of control methodology, an image recognition-based auto-focusing strategy is introduced. A high-resolution camera captures real-time images of the target laser spot. Image processing techniques are employed to extract key features such as spot diameter, shape, and clarity. These features are used to dynamically calculate optimal focal length adjustment parameters, enabling automatic closed-loop focusing via a stepper motor. Experimental results indicate that the system has a light spot centroid offset of no more than 65 μm within a working distance of 0.5 ~ 30 m, which meets the design requirements and can effectively achieve spot focusing.
    6  Deep learning-based demodulation of Fabry-Pérot vernier spectral signals
    WANG Hui ZHAO Qichao WANG Haoqi SHAO Zhiqiang XIAO Shuang LIU Bin
    2025, 45(3):70-77. DOI: 10.11823/j.issn.1674-5795.2025.03.06
    [Abstract](480) [HTML](171) [PDF 7.16 M](743)
    Abstract:
    To enhance the demodulation accuracy of vernier spectral signals in Fabry-Pérot (F-P) sensors, this study proposes a direct deep learning-based demodulation method for spectral data. The method involves preprocessing spectral data to convert complex vernier spectral information into formats compatible with Convolutional Neural Network (CNN), followed by training and testing deep learning models on the processed full-spectrum data. The CNN architecture was employed for feature extraction and classification of spectral data, enabling accurate demodulation of target signals. Experimental validation was conducted utilizing spectral data collected from a dual-cavity F-P sensor with 112.5 nm / MPa sensitivity. The results demonstrate that the CNN model achieved an average accuracy of 92.49% with 10-fold cross-validation, accompanied by a Root Mean Square Error (RMSE) of 0.039 2 MPa and a mean relative error of 3.31%. The hybrid Convolutional Neural Network-Long Short Term Memory (CNN-LSTM) model exhibited superior performance with an average accuracy of 96.98%, an RMSE of 0.039 0 MPa, and a mean relative error of 3.28%. Notably, the CNN-LSTM approach attained high precision using only 256 sampled data points, demonstrating remarkable efficiency. This method provides an effective technical pathway for advancing spectral signal demodulation technology, offering significant reference value for developing intelligent optical sensing systems.
    7  Application of optical carrier suppression modulation technology in the calibration of frequency shift for Brillouin optical time domain reflectometers
    SUN Xiaoqiang FU Dongbo ZHOU Xuanyu HAO Wenhui CHEN Longquan ZHANG Dayuan
    2025, 45(5):90-96. DOI: 10.11823/j.issn.1674-5795.2025.05.09
    [Abstract](195) [HTML](141) [PDF 1.26 M](292)
    Abstract:
    A Brillouin frequency shift parameter calibration method based on optical carrier suppression modulation technology is proposed to meet the metrological calibration requirements for frequency shift of Brillouin optical time domain reflectometer (BOTDR) in distributed fiber sensors. Fiber Brillouin scattering signals were simulated using the frequency doubling signal generated by optical carrier suppression modulation technology, and a mathematical model and value traceability diagram between the Brillouin frequency shift reference value and the output signal frequency of the signal generator were provided, to achieve the value traceability of Brillouin frequency shift to the atomic time standard reference device. By adjusting the frequency of the output signal of the signal generator, the Brillouin frequency shift indication error at different frequency points within the frequency shift range can be obtained. Experiments were conducted to obtain calibration results for different frequency shift points within the range of 10.6 to 11.8 GHz, and an uncertainty analysis was performed. When the measured Brillouin frequency shift value is 10 998.38 MHz, the expanded uncertainty is 0.07 MHz (k = 2). This calibration method can meet the metrological traceability requirements for BOTDR frequency shift in the field of fiber optic sensing applications, providing strong support for promoting the performance improvement and widespread application of BOTDR.
    8  Research progress review on precision ranging technology based on microcombs
    HUANG Bohang JIANG Tinghao ZHAO Chunbo WU Tengfei HE Guangqiang
    2025, 45(6):10-28. DOI: 10.11823/j.issn.1674-5795.2025.06.01
    [Abstract](356) [HTML](202) [PDF 21.52 M](363)
    Abstract:
    The basic principles of precision ranging based on soliton microcombs and their advantages in chip-level integration, high precision, and high speed are introduced. The principles and implementations of single-microcomb frequency-modulated continuous wave, chaotic ranging, dispersive interferometry, synthetic-wavelength metrology, and dual-comb ranging are elaborated. The development paths such as repetition frequency locking, frequency scanning, and parallel imaging are discussed. It is pointed out that the research in this field has progressed from proof-of-concept demonstrations to a new stage focused on performance optimization and practical exploration. It is further proposed that the future development will be characterized by system-level full optoelectronic integration, multifunctional reconfigurability, and deep cross-disciplinary convergence, through which a large-scale deployment of chip-scale precision LiDAR in automotive perception, industrial metrology, space exploration, and related applications is expected to be enabled.
    9  A high-speed subpixel localization approach for small-scale spots in industrial vision applications
    HAN Yixuan GAO Doudou DONG Dengfeng WANG Bo QIU Qifan
    2025, 45(6):29-40. DOI: 10.11823/j.issn.1674-5795.2025.06.02
    [Abstract](207) [HTML](124) [PDF 6.02 M](320)
    Abstract:
    To address the issues of accuracy degradation and computational delay in extracting small spot centers in the field of industrial high-speed visual measurement, a high-speed real-time spot localization method for small-sized spots is proposed. A Region of Interest (ROI) extraction algorithm based on sliding window brightness consistency is designed and implemented in a Field Programmable Gate Array (FPGA) to improve detection speed. A small spot center extraction algorithm combining distance-weighted least-square fitting and a Signal-to-Noise Ratio (SNR)-based adaptive weight adjustment mechanism is introduced to enhance the localization robustness of small spots under varying lighting and noise conditions. Experimental results show that the proposed method has achieved a spot center localization error of not more than 0.05 pixels, with a frame rate of 160 frames per second, significantly outperforming traditional methods in processing speed. This method to a great extent meets the high-precision real-time localization requirements of small spot centers in industrial high-speed visual measurement.
    10  Design and verification of miniaturized space's optical payloads for batch production
    CHENG Xin CONG Shanshan XUE Zhipeng LIU Jinquan MIAO Zijian WANG Sheng
    2025, 45(6):41-49. DOI: 10.11823/j.issn.1674-5795.2025.06.03
    [Abstract](173) [HTML](146) [PDF 20.10 M](335)
    Abstract:
    To address the bottlenecks of high cost and long development cycles in traditional aerospace product manufacturing, and to meet the urgent demand for batch production of space optical payloads in giant satellite constellations, this study adopts an integrated approach combining modular structural design, process optimization, and automated testing technology to develop a Maksutov-Cassegrain optical system with a small F-number and minute pixels. By enab-ling interchangeable assembly of lenses and focal plane components, along with integration into an automated assembly and testing line, the system achieves a ground pixel resolution of 4.5 m and a swath width of 13.5 km × 13.5 km at an orbital altitude of 500 km, with a total weight of only 1.1 kg. This approach has improved the overall development efficiency by 50%. The results provide crucial technical support for the low-cost, rapid, and batch-producible manufacturing of miniaturized space optical payloads.
    11  Research on the spot localization accuracy of four-quadrant superconducting nanowire single-photon detector
    LI Zhijian LIU Hao WAN Chao HAO Hao ZHAO Qingyuan MI Qinggai ZHANG Lei LI Cong SUN Bo MAO Litao WANG Huabing WU Tengfei
    2026, 46(1):19-32. DOI: 10.11823/j.issn.1674-5795.2026.01.02
    [Abstract](244) [HTML](108) [PDF 23.18 M](350)
    Abstract:
    This study addresses the photon count distortion under high count rates and difficult positioning under low Signal-to-Noise Ratio (SNR) condition in Four-Quadrant Superconducting Nanowire Single-Photon Detectors (QD-SNSPD) The nonlinear correction mechanism for photon counts is introduced and an analytical solution for Gaussian spot localization problem after correction is derived. A differential localization method using non-integer power operations is proposed, which increase signal differentiation between positive and negative semi-axes through an exponent n>1 to improve positioning accuracy. Results demonstrate that count correction improves spot localization accuracy under high count rates. Non-integer power operations effectively reduce the positioning errors under low SNR conditions. Compared with classical differential localization methods, the 1.4-power operation reduces the positioning errors by 27% when SNR < 10, and the corrected Gaussian model reduces the errors by 70% when SNR > 50. When photon counts exceed 104, both the corrected Gaussian model and power operation methods (0.8n2) achieve a positioning standard deviation below 0.01 times the spot radius. These findings provide substantial support for high-precision spot localization using QD-SNSPDs.
    12  Electro-optic frequency combs: theory and applications
    CHEN Caixin LI Sixuan YAN Ming ZENG Heping
    2026, 46(1):33-54. DOI: 10.11823/j.issn.1674-5795.2026.01.03
    [Abstract](239) [HTML](124) [PDF 18.17 M](397)
    Abstract:
    This paper introduces the fundamental principles and classifications of optical frequency combs, reviews the generation mechanisms and representative architectures of electro-optic frequency combs (EOFCs), and systematically summarizes implementation approaches and performance characteristics of EOFCs on emerging material platforms, including thin-film lithium niobate (TFLN) and silicon nitride (SiN), covering schemes based on Mach-Zehnder modulators, phase modulators and micro-resonator modulator. Methods for spectral extension of EOFCs are discussed, followed by an overview of EOFC applications in spectroscopy, precision ranging, and optical communications. Finally, future development directions are outlined, emphasizing that interdisciplinary integration and co-design can further reduce control complexity, noise sensitivity, and thermal drift, while improving accuracy, environmental robustness, and frequency-stabilization performance, thereby accelerating the practical deployment of EOFCs in precision ranging and coherent communications.
    13  Dual-mixing time-delay detection of weak frequency signals enabled by local-oscillator optical enhancement
    ZHANG Yunrui GAO Hao LUO Bin YU song
    2026, 46(1):55-62. DOI: 10.11823/j.issn.1674-5795.2026.01.04
    [Abstract](202) [HTML](97) [PDF 6.76 M](315)
    Abstract:
    In the process of ultra long span fiber frequency transmission, factors such as power attenuation and additional noise of active devices lead to weak frequency signal at the receiving end, which limits the signal detection resolution and sensitivity. To solve this problem, the research team proposed a dual-mixing time-delay detection of weak frequency signals enabled by local-oscillator optical enhancement. The weak carrier signal power was enhanced by a coherent laser, and the dual-mixing time-delay detection structure was used to improve the receiving sensitivity. At the same time, the high signal-to-noise ratio signal extraction was realized by combining with the balanced detection technology. The experimental results show that compared with the traditional intensity modulation / direct detection method, the dual-mixing time-delay detection of weak frequency signals enabled by local-oscillator optical enhancement can effectively improve the sensitivity of the receiver by about 10 dB, the RF power is increased by 25 dB under the same input power condition, and this method achieves excellent frequency stability, with Allen deviation of 2 × 10-13@1 s and 2.1 × 10-15@10 000 s, and stability of 3 × 10-17@1 s and 3 × 10-19@10 000 s under the condition of difference frequency of 10 kHz, which verifies the feasibility and significant advantages of the proposed method in high-precision optical fiber frequency transmission.
    14  Research progress on precise three-dimensional shape measurement technology for complex scenes based on structured light illumination
    ZHANG Qican WU Zhoujie WANG Yajun LIU Yuankun
    2026, 46(1):63-82. DOI: 10.11823/j.issn.1674-5795.2026.01.05
    [Abstract](251) [HTML](137) [PDF 66.82 M](359)
    Abstract:
    This paper introduces the characteristics of structured-light-based three-dimensional (3D) measurement technology, including its non-contact nature, high accuracy, and high flexibility. It reviews the principles and recent research progress of fringe structured-light illumination techniques for 3D surface measurement in complex scenes, with particular emphasis on a series of studies conducted by our research group to improve measurement accuracy and efficiency. Application cases of fringe structured-light-based 3D measurement are analyzed in the areas such as large-scale fossil fault planes, high-dynamic-range workpieces, high-speed kinematic processes, and large-aperture and smooth optical components. The challenges faced by 3D surface measurement technology based on structured-light illumination are further discussed. It is pointed out that future advancements can be achieved through deep interdisciplinary integration, thereby further enhancing the accuracy and efficiency of fringe structured-light-based 3D measurement, overcoming existing technical bottlenecks, and enabling highly reliable and digitized 3D measurement in a wide range of extreme and complex environments.
    15  Laser ranging based on optical frequency combs: status and perspectives
    LIU Zihan WANG Zeping CHANG Bing YAN Yingzhan YAO Baicheng TAN Teng
    2026, 46(1):83-104. DOI: 10.11823/j.issn.1674-5795.2026.01.06
    [Abstract](270) [HTML](137) [PDF 42.05 M](432)
    Abstract:
    This paper reviews the principles and distinctive features of optical frequency combs, and introduces the advantages of optical-frequency-comb-enabled laser ranging, including high accuracy, high measurement speed, and large detection range. The recent research progress of comb-based laser ranging methods is analyzed, covering time-of-flight method, dispersive interferometry method, frequency-modulated continuous wave method, and random-modulated continuous wave method. Finally, future prospects for optical-frequency-comb-based laser ranging are discussed. It is pointed out that by exploring new physical mechanisms for comb-based ranging we may further extend the measurement range, increase the update rate, and reduce system complexity; by developing new schemes for comb stabilization and flexible parameter control we can suppress noise and thus further improve measurement accuracy; and we can enhance practicality by establishing drift error monitoring and automatic calibration mechanisms across multiple time scales, as well as by integrating multi-parameter environmental sensing and an online refractive-index compensation chain.
    16  Research on phase noise analysis and suppression methods of white light interference signals
    MA Long LI Ying HAO Jingtang LIANG Kun YIN Xutao PEI Xin
    2026, 46(1):105-128. DOI: 10.11823/j.issn.1674-5795.2026.01.07
    [Abstract](174) [HTML](96) [PDF 44.89 M](383)
    Abstract:
    This paper introduces the advantages of white light interferometry, including non-contact operation, high precision, and strong adaptability. However, in practical measurements, interference signals are affected by light source instability, scanning nonlinearity, and environmental disturbances, leading to a significant increase in phase noise. The recent progress in the analysis and suppression of phase noise in white light interference signals is reviewed. Particular attention is given to a series of studies carried out by our research group, including the establishment of a multi-source noise analysis framework that incorporates random perturbations, dispersion errors, and vibrations, as well as noise suppression strategies. Finally, future research directions are discussed, emphasizing the need for deeper investigations into the formation mechanisms of phase noise, phase response characteristics, and coupling with system parameters. Multi-source noise modeling, adaptive optimization, and deep learning techniques can be applied to the analysis and suppression of phase noise in white-light interference signals, thereby advancing precision measurement technologies.
    17  FMCW laser ranging method based on electro-optic double-sideband modulation
    CUI Hang DENG Zhongwen ZHANG Hengkang WANG Shuzhen SUN Haifeng MENG Xiawei ZHANG Shuwei GONG Junyu LI Xiaoping
    2026, 46(1):129-139. DOI: 10.11823/j.issn.1674-5795.2026.01.08
    [Abstract](222) [HTML](100) [PDF 14.02 M](365)
    Abstract:
    Traditional frequency modulated continuous wave (FMCW) laser ranging techniques are mostly implemented using tunable lasers or dual-light-source architectures. These systems are complex and difficult to engineer, and they suffer from error amplification in dynamic scenarios. To address these limitations, our research team proposed an FMCW laser ranging method based on electro-optic double-sideband (DSB) modulation. A frequency-stabilized laser and an electro-optic modulator are used to generate two oppositely swept frequency signals, which reduces the system size and mitigates dynamic errors. An all-phase fast Fourier transform (APFFT) algorithm was designed to achieve stable and reliable phase retrieval under highly dynamic and high-noise conditions. In addition, Kalman filtering was introduced to optimize dynamic state estimation and improve ranging stability. Experimental results show that, with a 20 m fiber link, the absolute distance measurement error of the proposed method does not exceed ± 20 μm. For a sinusoidally vibrating target with amplitude ≤ 500 nm and frequency ≤ 200 Hz, the relative displacement measurement error does not exceed ± 25 nm. These results verify the high reliability of the proposed method and provide strong support for promoting the engineering deployment of FMCW laser ranging technology.
    18  Full-field spectral-domain interferometry and its application based on a digital micromirror device
    ZHANG Jinxu YANG Yuetang WU Guanhao
    2026, 46(1):140-146. DOI: 10.11823/j.issn.1674-5795.2026.01.09
    [Abstract](175) [HTML](106) [PDF 9.62 M](339)
    Abstract:
    Current full-field spectral-domain interferometry relies on wavelength or galvanometer scanning, which limits its ability to acquire full-field information in a single detection. To address this issue, this paper proposes a full-field spectral-domain interferometry technique based on a Digital Micromirror Device (DMD). By encoding the spatial light field distribution via the DMD, time-varying spectral signals corresponding to sequentially loaded masks are acquired, which are further decoded to obtain the amplitude response at each spatial pixel. Combined with the measurement algorithm, full-field information retrieval is achieved. Experimental results demonstrate that the proposed technique enables high-precision spectral interferometric distance measurement and spectroscopic ellipsometric film thickness measurement, while significantly improving full-field measurement efficiency. The DMD-based full-field spectral interferometry technique is suitable for rapid three-dimensional structure recovery and reconstruction of sparse surfaces, providing strong support for efficient thickness and topography characterization of polished wafers, Silicon-On-Insulator (SOI) substrates, and bonded interfaces.
    19  Calibration methods for structured light 3D measurement systems on multiple types of non-diffuse reflective surfaces
    ZHAO Huijie YANG Xu LI Xiang JIANG Hongzhi LI Xudong
    2026, 46(1):147-159. DOI: 10.11823/j.issn.1674-5795.2026.01.10
    [Abstract](197) [HTML](114) [PDF 5.43 M](318)
    Abstract:
    Current domestic and international calibration specifications for structured light 3D measurement systems do not specify calibration methods for scenarios where the surfaces of measured objects are various non-diffuse reflective surfaces, and thus cannot fully meet the actual calibration needs. To address this issue, our research team analyzed the actual calibration scenarios of structured light 3D measurement systems, defined translucent surfaces, highly reflective surfaces and high dynamic range reflectivity surfaces from the perspective of optical properties, and designed standards applicable to different surfaces. In accordance with actual requirements, we formulated specific calibration methods, realizing the calibration of the capability of structured light 3D measurement systems to measure the geometric parameters of various non-diffuse reflective surfaces. The calibration method for structured light 3D measurement systems for various non-diffuse reflective surfaces proposed by our research team supplements and perfects the existing calibration methods for structured light 3D measurement systems, and plays an important role in promoting the development of structured light 3D measurement technology toward precision and standardization.
    20  Influence mechanism of beam incident angle on the angular measurement accuracy in rotational scanning systems and its compensation method
    WANG Yiran SHI Shendong ZHAO Zesen YANG Ruiqi WANG Zibo ZHU Jigui
    2026, 46(1):169-180. DOI: 10.11823/j.issn.1674-5795.2026.01.12
    [Abstract](197) [HTML](132) [PDF 10.36 M](314)
    Abstract:
    Changes in the beam incidence angle caused by variations in receiver orientation in a rotating laser scanning angle measurement system can introduce systematic angular measurement errors that affect the system's precision and robustness. To address this issue, a local projection model and a Gaussian light-strip distribution model were established based on beam propagation geometry and receiver structure characteristics, and differences in photoelectric response under different incidence conditions were analyzed. Furthermore, by incorporating attitude information provided by an Inertial Measurement Unit (IMU), an effective receiving surface model was constructed in the receiver coordinate system, and an error compensation method considering receiver structure features was proposed. Simulation results show that as the incidence angle increases, the photoelectric response waveform of the receiver becomes significantly asymmetric, with angular measurement errors reaching several tens of arcseconds. The proposed compensation method effectively corrected these errors, reducing the root-mean-square (RMS) error by approximately 90%. In precision turntable experiments, the roundness error of the receiver trajectory decreased from 0.81 mm before compensation to 0.17 mm after compensation, confirming the effectiveness of the compensation model. The study enriches the error modeling framework of rotational laser scanning systems, and provides an effective approach to enhance measurement accuracy and robustness under varying receiver attitudes.
    21  Research status and prospects of LiDAR point cloud and visible-light image fusion technology
    MI Ruoxin MI Qinggai CUI Lin WANG Zining LI Haojin ZHOU Jiaxiang WANG Rui WANG Yifan WU Tengfei TAN Yidong
    2026, 46(2):10-39. DOI: 10.11823/j.issn.1674-5795.2026.02.02
    [Abstract](124) [HTML](70) [PDF 61.82 M](107)
    Abstract:
    This paper systematically introduces the fundamental principles of traditional and single-photon LiDAR systems, and image fusion technologies. It provides an in-depth analysis of the feature disparities between traditional / single-photon LiDAR point clouds and visible images, as well as the associated image registration challenges. The study discusses the advantages and limitations of current registration methods, including calibration-based projection, feature matching, and deep learning approaches. Furthermore, it reviews the state-of-the-art in fusion technology for these modalities and explores its applications in fields such as target detection, recognition, and three-dimensional reconstruction. Looking ahead, the development of LiDAR point cloud and visible image registration necessitates research into methods capable of automatic adjustment and calibration during practical deployment. The application of more sophisticated neural network models is required to achieve deep multimodal information fusion, alongside further algorithm optimization to enable large-scale implementation. Regarding fusion technology, future work should focus on front-end collaborative design at the hardware level, adopt more advanced active sensing paradigms to enhance system efficiency and intelligence, and leverage advanced deep learning-based super-resolution networks to improve perceptual capabilities in complex environments.
    22  Automatic curved-surface measurement technology using laser tracking scanners based on model-driven approach
    LI Yan ZHANG Wei SUN Anbin FAN Shuaixin MENG Yuhang
    2026, 46(2):90-100. DOI: 10.11823/j.issn.1674-5795.2026.02.07
    [Abstract](77) [HTML](168) [PDF 7.28 M](73)
    Abstract:
    To address the demand for rapid profile inspection of a large number of curved-surface components during aircraft assembly, the research team proposed an automated measurement method based on a laser tracking scanner. First, the coordinate systems of the measuring equipment and the measured object are aligned using the theoretical positioning points provided by the object model. Second, the measurement path of the equipment is planned according to the requirements of the measured curved-surface features of the object, and the complete feature data of the measured curved-surface of the object are automatically collected. Then, the measured data are finely aligned with the theoretical digital model for a second time. Finally, the deviation of the curved-surface profile is calculated. An experiment was conducted using a large-scale rotating paraboloid with a diameter of 4 meters. The results show that this method significantly improves the level of measurement automation. Compared with the traditional manual measurement method, the scanning efficiency is increased by approximately 30%, and the measurement results are consistent. This study provides strong support for advancing the development of high-efficiency geometric quantity inspection technology for curved-surface components of aviation equipment.
    23  Research on high-temperature dynamic strain measurement technology for hot-section components using optical fiber sensing
    CHEN Shuang SUI Guanghui ZHANG Xinying ZHANG Penghao HUANG Caixia
    2026, 46(2):109-119. DOI: 10.11823/j.issn.1674-5795.2026.02.09
    [Abstract](74) [HTML](119) [PDF 7.99 M](70)
    Abstract:
    To accurately measure the high-temperature dynamic strain of hot-section components of aero-engines, this paper systematically investigates a high-temperature dynamic strain measurement method based on fiber optic sensing technology. High-temperature-resistant grating structures, inscribed using femtosecond lasers, were installed and fabricated on the substrate surface via plasma spraying technology. The performance of the sensors was tested and evaluated using high-temperature static and dynamic strain calibration rigs that simulate the operating conditions of hot-section components. Finally, validation was conducted through two aero-engine test rig experiments. The results from disk rig tests designed to assess high-temperature endurance and measurement accuracy demonstrated that the sensors could withstand environments up to 650 ℃, with a deviation of less than 5% between measured centrifugal strain and design simulations. The results from high- and low-cycle fatigue rig tests designed to verify dynamic strain measurement capabilities under blade vibration loads indicated a discrepancy of approximately 1.3% between measured and theoretical resonance frequencies, while the dynamic strain amplitudes were consistent with the predicted design magnitudes. The high-temperature dynamic strain measurement method based on fiber optic sensing technology provides important technical support for accurately assessing stress distribution and fatigue life of hot-section components in aero-engines and identifying danger points in advance.
    24  Research status and prospects of single photon lidar technology
    YANG Yang WANG Zining MI Qinggai WU Tengfei
    2024, 44(6). DOI: 10.11823/j.issn.1674-5795.2024.06.02
    [Abstract](1337) [HTML](300) [PDF 27.35 M](979)
    Abstract:
    This article introduces the principle of single-photon Light Detection and Ranging(LiDAR) system, elaborates on the composition and core device characteristics of single-photon LiDAR system, and discusses the advantages of single-photon LiDAR technology such as photon-level sensitivity and picosecond level time accuracy. From the perspectives of hardware improvement and algorithm improvement, optimization methods for single-photon LiDAR systems were analyzed. The applications of single-photon LiDAR technology in ground-based long-range target imaging, aerospace remote sensing, and complex scene imaging were explored, and the future development direction of single-photon LiDAR technology was prospected. It was pointed out that the detection efficiency, dark count rate, time jitter, and power consumption can be improved by expanding the detector response band, optimizing device design, and applying new materials; Advanced algorithms can be utilized to achieve deep information mining, and improve detection accuracy and real-time performance; Single-photon LiDAR technology can be combined with other advanced technologies to expand its application scope.
    25  Metrology and test technologies for optical properties of materials: development status and trends
    GAN Haiyong YU Tianlai KUANG Bo ZHENG Chundi FENG Guojin MA Zhiyuan XU Guozhen HE Yingwei
    2024, 44(6). DOI: 10.11823/j.issn.1674-5795.2024.06.01
    [Abstract](695) [HTML](254) [PDF 20.73 M](878)
    Abstract:
    This paper summarizes the research progress of metrology and test technology for optical properties of materials, including internationally mutual recognized calibration and measurement capabilities, international comparisons, national metrology primary standard facilities, verification regulations and calibration specifications, and national standards. It introduces the methods, principles, capability, and uncertainties of primary standards such as spectral rule transmittance, spectral diffuse reflectance, and diffuse transmittance visual density measurement facilities, as well as social common standards such as wavelength in a continuous wide spectrum. It also summarizes the national standards on the test methods for the comprehensive optical, mechanical, thermal, and chemical properties of optical materials with colorless optical glass as an example. It concludes that the national metrology and test technology for optical properties of materials have been improved rapidly, with significant international and domestic influence, effectively ensuring the research and application of high-quality optical materials and high-precision material optical property measurement instruments, and promoting the high-quality development of the national optical material industry. With increasing demands for advanced optical materials in cutting-edge fields, it is very important to steadily enhance the technical infrastructure, continuously expand the measurement range, and deeply focus on the physical essences, to underpin the key metrology and test technology for optical properties of materials to further play a key role in the fields of precision measurement, efficient perception, digital reconstruction, intelligent decision-making, human-computer interaction and so on.
    26  Review on research and applications of optical frequency combs based on quantum cascade lasers
    MA Zejun MA Yu LIU Fengqi LU Quanyong
    2024(4). DOI: 10.11823/j.issn.1674-5795.2024.04.02
    [Abstract](1077) [HTML](206) [PDF 18.81 M](744)
    Abstract:
    In this paper, the mechanism of optical comb in Quantum Cascade Laser (QCL) are discussed, including the way of generating optical comb and the influence of related nonlinear effects (such as four-wave mixing effect) on its operation. The importance of waveguide design for quantum cascade laser is elaborated, and the application prospects of QCL optical frequency comb in mid-infrared and terahertz bands are analyzed. It is pointed out that the design efficiency of optical frequency comb can be increased by improving the theoretical model and explaining the physical mechanism of self-starting harmonic optical frequency comb. The development direction of loop quantum cascade lasers in soliton communication and spectral measurement is prospected.
    27  Advances in novel spectral techniques based on metasurface and computational reconstruction
    TANG Jiachen ZHANG Suhui HU Chunguang
    2024(4). DOI: 10.11823/j.issn.1674-5795.2024.04.03
    [Abstract](1534) [HTML](240) [PDF 43.68 M](812)
    Abstract:
    This paper aims to explore the latest research progress in spectroscopic technology and introduce the cutting-edge directions in the field of spectroscopic analysis, represented by metasurface spectrometers and computational reconstruction spectroscopic techniques. Firstly, the paper introduces the principle of metasurface technology, analyzes the advantages of lightweight and ultra-compact metasurface spectrometer, expounds the research status of representative metasurface spectrometers such as folding metasurface spectrometer and multi-focus metasurface spectrometer, and discusses the application prospect of metasurface spectrometer in the fields of disease diagnosis, quality control and information processing. Next, the principle of computational reconstruction spectroscopy is described, the characteristics and research situation of waveguide, spatial, filter coded and detector coded computational reconstruction spectrometers are introduced, and the application potential of computational reconstruction spectrometers in spectrum analysis and chemical research is discussed. Then, the principle and characteristics of metasurface hyperspectral imager based on free shape element and deep learning are introduced, and the advantages of combining metasurface and computational reconstruction spectroscopy are discussed. Last, it is pointed out that the combination of metasurface and computational reconstruction spectroscopy will promote the development of the spectrum measurement field to be more intelligent, portable and multi-functional. It is proposed that the spectral measurement technology can be developed more accurately and efficiently by optimizing spectral image reconstruction algorithm, encoder and photodetector design and manufacturing process in the future.
    28  Review of research on fractal laser precision control
    ZENG Heping WU Xiuqi PENG Junsong
    2024, 44(3). DOI: 10.11823/j.issn.1674-5795.2024.03.01
    [Abstract](766) [HTML](226) [PDF 15.47 M](822)
    Abstract:
    This review introduces typical fractal structures and related control methods present in lasers, such as soliton fractals in single-pass optical fibers, fractals in vector soliton collisions, fractals in spin wave solitons, and fractals in breather lasers. It elucidates the characteristics of fractal lasers in mode-locked lasers, including high spectral density, strong anti-interference capabilities, high tuning precision, and the ability to achieve high-resolution femtosecond fiber combs. The paper discusses the issue of enhancing the resolution of femtosecond fiber combs, pointing out that using devil's staircase and Farey tree fractal structures in breather lasers, combined with intelligent tuning methods, can improve the detection resolution of femtosecond fiber combs. It forecasts the development directions of breather fractal combs in fields such as molecular spectroscopy and arbitrary optical wave synthesis. The paper suggests that by developing high-precision optical frequency domain locking technology, time-frequency phase holographic tracking detection technology, fractal spectrum correlation and phase noise analysis technology, and optimizing theoretical models, it is expected to further suppress comb noise and break through the spectral density limits.
    29  Research on the application of domestic lasers in the optically detected magnetic-state-selection cesium atomic clock
    FAN Lifeng LI Yuanhao LIU Chen FENG Chen LI Chaojie WANG Yanhui
    2024, 44(3). DOI: 10.11823/j.issn.1674-5795.2024.03.09
    [Abstract](837) [HTML](218) [PDF 2.61 M](1227)
    Abstract:
    Under the background of domestic scientific instruments, in order to change the situation that the optically detected magnetic-state-selection cesium atomic clock still depends on imported lasers, three domestic distributed-feedback laser (DFB-LD) tubes were applied to the optically detected magnetic-state-selection cesium atomic clock, and the heterodyne beat-note measurement were conducted. In addition, the differences between these lasers and TOPTICA Photonics DFB-LD were analyzed. The experiment results show that the linewidth of the domestic laser is 1.999 MHz ± 6 kHz, and its frequency stability is 1 × 10-11@100 s; the domestic lasers can achieve the standard specification (1.45 × 10-12@100 s) on the domestic cesium beam tube, which provides ideas and references for further improving the performance of domestic lasers. Narrowing the domestic laser linewidth will be required in the future to achieve higher specifications of the compact cesium beam clock.
    30  Research progress on technology for improving pump energy conversion efficiency of microcavity soliton optical frequency combs
    CHEN Shaowu CHEN Kairong LI Wei FENG Liangsen LI Yudong WU Tengfei
    2024, 44(3). DOI: 10.11823/j.issn.1674-5795.2024.03.03
    [Abstract](894) [HTML](226) [PDF 15.39 M](775)
    Abstract:
    In this paper, the reasons for low energy conversion efficiency of soliton microcomb pump are analyzed, and several proposed technical schemes to improve the pump light energy conversion efficiency of soliton microcombs are introduced, including pump energy circulation storage structure of normal-anomalous dispersion double-cavity coupled structure, super-mode resonance splitting structure of master-auxiliary microring coupled-cavity structure, pump feedback waveguide coupled microcavity interference structure, etc. The advantages and disadvantages of each scheme are analyzed. On this basis, the optimal design of the pump feedback waveguide coupling cavity is given, and the simulation result shows that the pump light conversion efficiency of the single soliton micro comb can exceed 25%. At the end of this paper, the low energy consumption generation schemes of soliton microcombs are summarized and prospected, providing theoretical references for the development and application of techniques to improve the pump energy conversion efficiency of microcavity soliton optical frequency combs.
    31  Optical measurement techniques for scramjet combustor: A review
    WU Linghao SHI Xiaojiang LI Yang LEI Qingchun FAN Wei
    2024, 44(3). DOI: 10.11823/j.issn.1674-5795.2024.03.04
    [Abstract](920) [HTML](232) [PDF 16.25 M](900)
    Abstract:
    This paper reviews the latest developments and applications of optical techniques for measurements in scramjet combustor. Three categories of measurement methods are summarized: one-dimensional method, two-dimensional method and three-dimensional method. One-dimensional method can measure the combustion species concentration and temperature at a point or along a line in the combustion chamber, which is an important means to study the characteristics of combustion chemical reactions. Two-dimensional method can realize the planar measurement of flame structure or flow field information, and is an important approach to study the mixing of fuel and air, flame propagation, and the interaction between flame and turbulence, vortex and shock wave. The three-dimensional method is an important extension of the measurement ability of the two-dimensional method. It can overcome the line-of-sight limitation of the two-dimensional method, and realize the three-dimensional measurement of the combustion field. It is pointed out that endoscopy technology will be an important approach to meet the needs of optical testing in realistic combustion chamber. This paper summarizes the major problems encountered in the application of optical measurement in scramjet combustion chamber. Possible methods to improve the maturity of optical measurement in scramjet combustion chamber is prospected.
    32  Review on the development of optical surface absolute detection methods
    HU Yuan HOU Zhenmin JIANG Hongmei
    2024(2):1-12. DOI: 10.11823/j.issn.1674-5795.2024.02.01
    [Abstract](1489) [HTML](300) [PDF 1.64 M](3521)
    Abstract:
    This paper makes a detailed introduction to the measurement principles of the optical surface absolute de- tection methods such as three-plane (spherical) mutual detection method, bispherical method, rotating average method, translational difference method (pseudo-shear interference method), parity function method, random ball method and rota- tion-translational method. It also describes the development status of absolute detection methods at home and abroad, and discusses the application fields of each absolute detection method and the corresponding technical limitations by compari- son. Then it makes prospects to the future trends of absolute detection technology from both physical implementation and algorithmic perspectives and proposes to increase the absolute detection accuracy of surface shape by improving the accu- racy of external mechanical structure. Finally, it analyzes the advantages of deep neural network algorithm and computa- tional optical imaging technology in the absolute detection process, and proposes that the absolute detection accuracy of optical surface shape can be further improved by combining the two technologies with the absolute detection methods. It can provide a useful reference for the research of absolute detection.
    33  Laser feedback precision measurement and applications
    TAN Yidong PENG Cheng
    2024(1). DOI: 10.11823/j.issn.1674-5795.2024.01.03
    [Abstract](693) [HTML](244) [PDF 7.87 M](1429)
    Abstract:
    Introduced the theoretical model of laser feedback interferometry, explaining the technical characteristics such as high sensitivity, simple device structure, self-aligning, and the ability to achieve precise measurements of non-cooperative targets. The advantages of laser feedback measurement and traditional interferometric measurement methods were discussed. Explored various applications of laser feedback measurement in industrial and research domains, including displacement measurement, angle measurement, vibration measurement, and absolute distance measurement. It is pointed out that the use of structures like harmonic reuse, frequency reuse, polarization reuse, and full-path coherent combining can enhance the application performance of feedback measurement. Finally, the future development direction of laser feedback technology is discussed, providing reference for promoting the widespread application of feedback technology.
    34  Review of automatic frequency locking methods for lasers
    ZHANG Xiaojing BAI Jinhai HU Dong
    2024(1). DOI: 10.11823/j.issn.1674-5795.2024.01.05
    [Abstract](863) [HTML](268) [PDF 1.28 M](2438)
    Abstract:
    Introducing the significance and purpose of laser automatic frequency locking, expounds the algorithm of laser automatic frequency locking and common optical frequency references, analyzes the differences and advantages and disadvantages of different algorithms and frequency references, discusses the problems and methods to solve in the field of laser automatic frequency locking, and obtains the development direction and improvement trend of the current laser automatic frequency locking field. The areas to be strengthened are pointed out, and some difficulties to be solved are put forward, which provides a reference for the subsequent research on automatic frequency locking of lasers.
    35  Transient detection of hydrogen atoms in flames based on cooperative multiphoton-induced fluorescence with femtosecond and nanosecond lasers
    LI Bo LI Shuaiyao HAN Lei GAO Qiang LIU Yan
    2024(1). DOI: 10.11823/j.issn.1674-5795.2024.01.08
    [Abstract](803) [HTML](255) [PDF 4.47 M](1107)
    Abstract:
    In order to accurately measure in-situ hydrogen atoms during the combustion process of hydrocarbon fuels, this paper proposes a strategy for transient online detection of hydrogen atoms using a femtosecond-nanosecond laser co-excitation method. In this approach, hydrogen atoms in the ground state are excited to the 2S level through a two-photon process using a 243 nm femtosecond laser. Subsequently, these hydrogen atoms are further excited to the 3P level by a 656 nm nanosecond laser, and the fluorescence emission from the 3P-2S transition is detected, enabling interference-free transient online measurement of hydrogen atoms over a wide equivalence ratio range. Experimental results demonstrate that the femtosecond-nanosecond co-excitation method effectively reduces the interference of hydrogen atoms produced by laser photolysis on the detection of in-situ hydrogen atoms.