With the increasing application of small-sized, high precision and intelligent MEMS devices, the research on MEMS metrology and testing technology is becoming more and more important. In order to improve China’s MEMS metrology and testing technology, the MEMS metrology plans that have been carried out by some overseas institutions and organizations are studied, the research works on advanced MEMS metrology and testing technology are reviewed, and the aspects in which China needs to learn from overseas research experiences and achievements are pointed out. This can help researchers in China to understand the research status of MEMS metrology and testing technology in other countries, so as to promote the development of MEMS metrology and testing technology in China.