Tuning fork optical fiber integrated three-dimensional resonant probe is a new type of probe used in micro-nano coordinate measuring machine, which consists of stone tuning fork and optical fiber rod measuring ball. In order to maintain the vibration stability and measurement accuracy of the probe, the length of the rod is limited to less than 1 mm, which results in the limitation of its ability to measure larger aspect ratio microstructures. In order to guarantee the measurement performance of the probe and further improve the measurement capability of the probe, the probe was optimized and improved, and the performance test experiment was carried out.