The recent progress of probes for coordinate measuring machine(CMM) was reviewed. The elastic mechanisms for the probes based on elastic strings and leaf springs have been designed. A typical structure, the stiffness model of the elastic mechanism was established. The elastic mechanisms with different shapes have been verified by simulation using ANSYS software. Several kinds of optical sensors and eight micro/nano probes of CMM developed by the author’s team were introduced. The performance of the probes were verified by experiment and tested. Finally, the research and development trends of the micro/nano probes for CMMs were summarized and prospected.