Stroboscopic white light interferometry (SWLI) has been known as a useful measurement technique for vibrating samples such as micro electro mechanical systems (MEMS) ormicro-opto-electro-mechanical systems (MOEMS) because it enables dynamic mode reconstruction and characterization of the tested system. The technique has been extended to measure a microstructure having an individual vibrating excitation source which cannot be detected or analyzed in advance by the traditional stroboscopic method. To provide a comprehensive insight into this newly developed technique, this chapter presents the theory, technical methodology and experimental results as well as analyses of the techniques for various applications. The technology provides an effective method in reconstructing and analyzing dynamic behavior of MEMS, MOEMS or even bio-objects in a micro- or nano-scale. Some experimental results and analyses have been provided to verify the feasibility and accuracy of the developed techniques with respect to various applications.