Thin-film thermocouples have advantages of small volume,simplicity of operation,high accuracy,etc.? In some special cases for accurate temperature measurement,they show the great advantage.By means of magenetron sputtering method in the production ofthermocouples,the material composition possibilities are almost unlimited.In this article, the NiCr∕NiSi thinˉfilm thermocouple is compared to the NiCrSi∕NiSiMg thin-film thermocouple in terms of static repeatability,service life and temperature limit,in order to better adjust measures to local conditions.And a compare test was done with a thin-film thermocouple produced by a university in Dalian,verifying the important role of the process on the properties of thin-film thermocouples.Thin-film thermocouples as a new type of thermocouples have a wide application prospect for surface temperature measurement of engine blades and other special parts.?