Scanning Electron Microscopy is an important tool in measurement of nanometer dimensions. The existing verification regulations of Scanning Electron Microscopy are commented in this paper and current situation of standards and feasibility in calibration are analyzed. Based on the authors’ domestic work, the actual calibration method of Scanning Electron Microscopy in magnification times error, repeatability and image linear distortion in X and Y directions are discussed. Proposals are offered in revision of metrology technical specifications of Scanning Electron Microscopy.