This paper mainly introduces the metrology,measurement and calibration research work of the step standard template with high step difference and the depth standard template with windrow groove based on the nano-measuring machine(NMM).Those include doing metrology,measurement and calibration of the two templates on the NMM,the calibration comparison of the nano-class depth standard template and depth height standard template when the different sensors are installed on the NMM and"To Realiye the Measuring Met...