The ZnO Thin-Film Gas Sensor
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    Abstract:

    ZnO thin film gas sensors having better gas sensing characters and better stability have been got on Al2O3 substrat by powder sputtering, so the practicality of ZnO thin film has been a chieved, it shows that ZnO is a new kinds of gas sensing basic materials besides SnO2. This work has also shows the law of the dependence of gas sensing current IG on alcohol concentration C.

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