Uncertainty Evaluation of Constant Pressure Gas Micro-flowmeter
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TB937

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    Abstract:

    The structure and calibration theory of a constant pressure gas micro-flowmeter are introduced.On the basis of thermal transpiration effect experiments of capacitance diaphragm gauge(CDG), the uncertainties of constant pressure gas micro-flowmeter are strictly evaluated.And the expanded uncertainties and coverage factors are also given.Through the leak-rate comparison with PTB using standard leak,the reliability of uncertainty evaluation results has been verified.

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History
  • Received:September 27,2005
  • Revised:January 10,2006
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