The new type of image scanner has higher frequency response and the scan with high speed can be realized. Based on the study of the movement parameter separation of the scanner, the multi-parameter test system is established by the use of the semi-conductor probes placed in a symmetry way. The nonlinear revision and the supplement method for the photo-electric 2D position probe are proposed. The DMA transmmision of the 4 channel analogy signal are realized. The test speed and accuracy are arised. The test of movement parameters is realized during the high frequency movement of scanner.