In recent years,much attention has been attracted on micro sensors.This paper introduces some aspects of novel development of microsensors.The following typical microsensors will be included:three axis accelerometer,single/dual axis accelerometer chip,surface micromachined gyroscope,micro inertia navigation system,micro magnetic flux gate sensor,micro magnetic resistance sensor,the nano Pirami pressure sensor,the micro coriolis force based mass flowmeter,a millimeter wave image sensor,GPS watch,CO 2(1cm 3)microsensor and micro/ultra micro angular displacement sensor.The essential sensing structure ,sensitiveness mechanism,and potential feature are introduced briefly.It is seen from the features and characteristics of the above microsensors that microsensors are already very important and useful parts of sensors