Accurate Measurement of Gauge Block Length Using Phase-stepping Interferometry
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TH74

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    Abstract:

    This paper discusses the theory of the phase\|stepping interferometry.The algorithms of phase measurement utilizing this theory,and the application of the decimal coincidence.On the basis of analyzing the method of measuring gauge blocks for the Kosters interferometer,a new method,which uses the phase\|stepping interferometry,has been brought.

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  • Received:
  • Revised:September 18,2000
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