From the general concept of nanometrology and measurement technology and somereference article,this paper sgnthesises the researching situation of the field in and out our country anddiscusses the developing situation and prospect of nanometrology and measurement technology innanometer scale by introducing our researching results. The discusses problems are how to relizemeasurement technology in nanometer scale, to complete nanometer reference coordinate, to generatenanometer accuracy repetitive movement,the connection between the transducer and coordinate systemof nanometer,and the uncertain limitations for nanometer accuracy measurement technology.