基于改进的偏振片旋转法的外差干涉非线性误差补偿研究
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1.上海理工大学光电信息与计算机工程学院;2.中国航空工业集团公司北京长城计量测试技术研究所

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国家自然科学基金项目(面上项目,重点项目,重大项目)


Research on nonlinear error compensation of heterodyne interference based on the improved polarizer rotation method
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1.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology;2.Changcheng Institute of Metrology &3.Measurement

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    摘要:

    外差激光干涉仪是超精密位移测量的核心装备,其测量精度提升的主要瓶颈,源于光学系统非理想特性引入的非线性误差(NCE),典型表现为信号不等幅、直流偏置与相位非正交三大特征。本文在严格推导外差干涉非线性误差级数模型的基础上,对比分析了传统解析补偿法与椭圆拟合法的内在局限,指出二者本质上属于被动数学拟合,难以消除动态位移下的残余谐波波动。为此,提出一种基于改进偏振片旋转法的主动反馈补偿策略:通过 1/4 波片与可控旋转偏振片构建闭环调控结构,利用自变量物理冻结机制,将随位移剧烈变化的动态非线性误差等效转化为静态常数偏置;结合静态预扫描剥离与快速傅里叶变换(FFT),实现系统初始相位偏置 ?? 的高精度标定与起点对齐。仿真结果初步验证了该方法在理想条件下的理论可行性,可将纳米量级一阶非线性误差有效抑制至0.1 nm以下,李萨如图形恢复为标准单位圆,测量精度逼近克拉美-罗下界(CRLB)噪声极限。本文工作现阶段以理论建模与仿真分析为主,从硬件闭环层面为消除非线性误差提供了新思路。后续将搭建实验平台进行硬件验证,可望为实现超精密、高线性度位移测量提供理论与技术支撑。

    Abstract:

    Heterodyne laser interferometers serve as core instruments for ultra-precision displacement measurement. The main bottleneck restricting their measurement accuracy lies in nonlinear errors (NCE) induced by non-ideal characteristics of optical systems, which are typically manifested in three features: unequal amplitude, DC offset, and non-orthogonality. Based on a rigorous derivation of the series model for nonlinear errors in heterodyne interferometry, this paper compares and analyzes the inherent limitations of traditional analytical compensation and ellipse-fitting methods. It is pointed out that both methods essentially belong to passive mathematical fitting and can hardly eliminate residual harmonic fluctuations under dynamic displacement conditions. To address this issue, an active feedback compensation strategy based on an improved polarizer rotation method is proposed. A closed-loop regulation structure is constructed using a quarter-wave plate and a controllable rotating polarizer. By means of the independent-variable physical freezing mechanism, dynamic nonlinear errors that fluctuate sharply with displacement are equivalently converted into static constant offsets. Combined with static pre-scan stripping and Fast Fourier Transform (FFT), high-precision calibration and initial alignment of the system initial phase offset ??are achieved. Simulation results preliminarily verify the theoretical feasibility of the proposed method under ideal conditions, which can effectively suppress first-order nonlinear errors from the nanometer scale to below 0.1 nm, restore the Lissajous figure to a standard unit circle, and bring the measurement accuracy close to the noise limit of the Cramér-Rao Lower Bound (CRLB). At this stage, this work focuses primarily on theoretical modeling and simulation analysis. This research introduces a new concept for eliminating nonlinear errors at the hardware closed-loop level, and an experimental platform will be constructed for hardware validation in future work, which is expected to offer theoretical and technical support for realizing ultra-precision and high-linearity displacement measurement.

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  • 收稿日期:2026-04-22
  • 最后修改日期:2026-07-28
  • 录用日期:2026-07-28
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