白光干涉信号相位噪声分析与抑制方法研究
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中国民航大学

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Research on Phase Noise Analysis and Suppression Methods in White Light Interference Signals
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Civil Aviation University of China

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    摘要:

    白光干涉术具有非接触、高精度、适应性强等优势,在微纳制造与高端装备检测中得到了广泛应用。然而,在实际测量中,干涉信号受到光源不稳定、扫描器件非线性与环境扰动等多重因素影响,信号的相位噪声显著增加,影响测量精度与鲁棒性。本文总结了本课题组近年来对白光干涉测量中相位噪声分析与抑制方法的研究,构建了相位噪声的多源框架,涵盖随机扰动、色散误差与振动影响等,提出了噪声抑制策略,有效提升了测量稳定性与分辨能力。通过标准样品、半导体器件与金属结构的实验验证,所提方法在抑制相位噪声、提升测量精度方面表现出显著优势,具备在高端制造领域的广阔应用前景。

    Abstract:

    White light interferometry, owing to its non-contact feature, high precision, and high adaptability, has been widely applied in micro-nano manufacturing and advanced equipment inspection. However, in practical measurement, interferograms are often affected by multiple factors such as light source instability, scanner nonlinearity, and environmental disturbances, leading to increased phase noise and reduced measurement accuracy and robustness. This work summarizes our research group""s studies on phase noise analysis and suppression in white light interferometry, where several comprehensive multi-source phase noise models have been established to address random fluctuations, dispersion errors, and vibration effects. Corresponding noise suppression strategies are proposed, significantly enhancing measurement stability and resolution. Experimental validations on standard samples, semiconductor devices, and metal structures demonstrate the proposed methods"" effectiveness in phase noise reduction and accuracy improvement, indicating strong potential for applications in advanced manufacturing.

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  • 收稿日期:2025-10-27
  • 最后修改日期:2025-12-04
  • 录用日期:2025-12-10
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