基于薄膜热电偶静态温度测试的箱式炉设计研究
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1.中国航空工业集团北京长城计量测试技术研究所;2.中国航发北京航空材料研究院

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TB9

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集成薄膜传感器测试与不确定度评定技术研究


Study on the Design of a Box Furnace Based on Static Temperature Testing of Thin-Film Thermocouples
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1.Changcheng Institute of Metrology &2.Measurement;3.Beijing Institute of Aeronautical Materials

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    摘要:

    针对工业自动化、航空航天等领域对薄膜热电偶精准测试的需求,以及传统管式炉在薄膜热电偶计量测试中无法满足其形态多样、参考端与测量端距离短等测试要求的问题,开展了箱式炉的设计与应用研究。基于塞贝克效应及薄膜热电偶测试原理,明确箱式炉需满足内部空间适配异型热电偶、温场波动度及梯度符合计量测试要求、参考端水冷控温等核心条件。据此设计的箱式炉采用保温构件拼装炉体、三段硅钼棒加热控温,并配备可固定试样与标准热电偶、实时监测参考端温度的水冷装置。热力学仿真结果显示,试样测量端温场及参考端温度符合设计预期,并展开了应用实例测试,通过Au-Pt薄膜热电偶的校准实践进一步验证了其有效性,可为薄膜热电偶在复杂环境中温度检测的应用提供可靠计量保障。

    Abstract:

    To address the demand for precise testing of thin-film thermocouples in fields like industrial automation and aerospace, as well as the limitation that traditional tube furnaces fail to meet testing requirements—such as diverse morphologies and short distances between the reference junction and measuring junction—in thin-film thermocouple metrological testing, this study focuses on the design and application of a chamber furnace. Based on the Seebeck effect and thin-film thermocouple testing principles, the core requirements for the chamber furnace are defined: its internal space must accommodate irregularly shaped thermocouples, the temperature field fluctuation and gradient must comply with metrological testing standards, and the reference junction must be equipped with water-cooling temperature control. The chamber furnace designed accordingly features a furnace body assembled from thermal insulation components, three-stage molybdenum disilicide rod heating for temperature control, and a water-cooling device that can fix samples and standard thermocouples while monitoring the reference junction temperature in real time. Thermodynamic simulation results demonstrate that the temperature field at the sample's measuring junction and the temperature of the reference junction meet the design expectations. Furthermore, application tests are conducted, and the calibration practice of Au-Pt thin-film thermocouples further verifies its effectiveness. This furnace can provide reliable metrological support for the application of thin-film thermocouples in temperature detection under complex environments.

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  • 收稿日期:2025-09-16
  • 最后修改日期:2025-10-24
  • 录用日期:2025-10-29
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