To further promote the development and application of domestic laser trackers, this paper systematically introduces the laser tracker technology and the independent research and development progress of laser trackers achieved by the research team at the Institute of Microelectronics of the Chinese Academy of Sciences (IMECAS). The basic principles and structural components of laser trackers are elaborated, and key techniques including laser ranging, miss-distance detection, precision angle measurement, servo tracking, error compensation and calibration are analyzed in depth. The current domestic and international testing specifications and technical standards in the field of laser trackers are presented, performance evaluation methods for laser trackers are discussed, and approaches to improve laser tracker performance are analyzed from both theoretical and application perspectives. The typical applications are introduced, such as in-situ intelligent manufacturing, real-time dynamic robot calibration and large-scale networked measurement. A series of research accomplishments achieved by the team at the IMECAS are highlighted, including the development of six-degree-of-freedom laser trackers, the design of extended functional modules for laser trackers, and the construction of the industrialization system for laser trackers. The development trend of laser tracker technology is prospected. It is pointed out that various novel tracking and measurement methods and equipment derived from laser trackers will play a vital role in high-end equipment metrology and advanced manufacturing.