基于模式间距匹配的微腔宽谱温度测量方法
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Broadband temperature measurement method for microcavities based on mode spacing matching
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    摘要:

    针对传统微环谐振器测温方法依赖单一谐振峰跟踪,导致测量范围受自由光谱范围限制的问题,提出一种基于横电 / 横磁(Transverse Electric / Transverse Magnetic, TE / TM)模式间距匹配的微腔宽谱温度测量方法。构建由宽调谐激光器、氮化硅微环谐振器、法布里-珀罗干涉仪及水蒸气吸收参考单元组成的测温系统,采用相对波长标度校准与绝对波长锚定相结合的两级校准策略,提取谐振峰中心波长并建立模式间距标准库,实现温度反演。实验结果表明:在-10 ~ 40 ℃条件下,模式间距与温度呈良好线性关系,决定系数为0.998;测得横电单模温度灵敏度为18.356 pm / K,横磁单模温度灵敏度为17.283 pm / K;传统单谐振峰跟踪法的测温误差为± 0.05 K,而基于模式间距匹配的微腔宽谱温度测量方法的测温误差为± 0.035 K,在提高测量精度的同时拓宽了测量范围,且提升了系统的鲁棒性和响应效率,为微腔光子温度测量的工程应用提供了重要参考。

    Abstract:

    To address the limitation of traditional micro-ring resonator thermometry, which relies on tracking a single resonance peak, thereby restricting the measurement range to within the free spectral range, we propose a wide-spectrum microcavity temperature measurement method based on the matching of transverse electric (TE) and transverse magnetic (TM) mode spacing. A temperature measurement system was constructed, comprising a widely tunable laser, a silicon nitride micro-ring resonator, a Fabry-Pérot interferometer, and a water vapor absorption reference unit. Employing a two-stage calibration strategy that combines relative wavelength scale calibration with absolute wavelength anchoring, the system extracts the center wavelengths of resonance peaks and establishes a standard library of mode spacing values, thereby enabling temperature retrieval. Experimental results demonstrate that within the temperature range of -10℃ to 40℃, the mode spacing exhibits a strong linear correlation with temperature, yielding a coefficient of determination of 0.998. The measured temperature sensitivity for the TE single mode is 18.356 pm / K, while that for the TM single mode is 17.283 pm / K. The temperature measurement error of the traditional single resonance peak tracking method is ± 0.05 K, while the error of the microcavity broadband temperature measurement method based on mode spacing matching is ± 0.035 K. This approach not only improves measurement accuracy but also expands the measurement range, enhances system robustness and response efficiency, and provides important references for the engineering applications of microcavity photonic temperature measurement.

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陈颖聪, 蔡静, 叶茜, 常海涛, 费凡.基于模式间距匹配的微腔宽谱温度测量方法[J].计测技术,2026,46(2):120~129:
10.11823/j. issn.1674-5795.2026.02.10.

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  • 在线发布日期: 2026-06-18
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