基于数字微镜设备的全场谱域干涉技术与应用
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Full-field spectral-domain interferometry and its application based on a digital micromirror device
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    摘要:

    现有的全场谱域干涉技术依赖于波长或振镜扫描,制约了其单次探测全场信息的能力。针对该问题,本文提出了基于数字微镜设备的全场谱域干涉技术,通过数字微镜设备对空间光场分布进行编码,采集顺序加载掩膜对应的时变谱域信息,进一步解码得到空间各像素处的幅值响应,结合测量算法实现全场信息获取。实验结果表明:该技术能够有效实现高精度光谱干涉距离测量和光谱椭偏膜厚测量,且显著提升了全场测量效率。基于数字微镜设备的全场谱域干涉技术适用于稀疏表面的三维结构快速恢复和重建,为抛光晶圆、硅绝缘片及键合界面的厚度与形貌高效表征提供了有力支撑。

    Abstract:

    Current full-field spectral-domain interferometry relies on wavelength or galvanometer scanning, which limits its ability to acquire full-field information in a single detection. To address this issue, this paper proposes a full-field spectral-domain interferometry technique based on a Digital Micromirror Device (DMD). By encoding the spatial light field distribution via the DMD, time-varying spectral signals corresponding to sequentially loaded masks are acquired, which are further decoded to obtain the amplitude response at each spatial pixel. Combined with the measurement algorithm, full-field information retrieval is achieved. Experimental results demonstrate that the proposed technique enables high-precision spectral interferometric distance measurement and spectroscopic ellipsometric film thickness measurement, while significantly improving full-field measurement efficiency. The DMD-based full-field spectral interferometry technique is suitable for rapid three-dimensional structure recovery and reconstruction of sparse surfaces, providing strong support for efficient thickness and topography characterization of polished wafers, Silicon-On-Insulator (SOI) substrates, and bonded interfaces.

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张金旭, 杨越棠, 吴冠豪.基于数字微镜设备的全场谱域干涉技术与应用[J].计测技术,2026,46(1):140~146:
10.11823/j. issn.1674-5795.2026.01.09.

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  • 在线发布日期: 2026-03-23
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