白光干涉信号相位噪声分析与抑制方法研究
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Research on phase noise analysis and suppression methods of white light interference signals
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    摘要:

    介绍了兼具非接触、高精度、适应性强等优势的白光干涉术,分析了实际测量中干涉信号受光源不稳定、扫描器件非线性与环境扰动等多重因素影响导致信号相位噪声显著增加的问题。阐述了目前白光干涉信号相位噪声分析与抑制方法的研究进展,重点展示了本课题组在该领域开展的一系列研究工作,包括构建涵盖随机扰动、色散误差与振动等影响因素的多源噪声分析框架,以及有针对性地提出的噪声抑制策略。指出未来应进一步深入研究白光干涉中相位噪声的形成机制、相位响应特性以及与系统参数的耦合关系等,提出可将多源噪声建模、自适应优化与深度学习等技术应用于白光干涉信号相位噪声分析与抑制领域,推动精密测量技术的发展。

    Abstract:

    This paper introduces the advantages of white light interferometry, including non-contact operation, high precision, and strong adaptability. However, in practical measurements, interference signals are affected by light source instability, scanning nonlinearity, and environmental disturbances, leading to a significant increase in phase noise. The recent progress in the analysis and suppression of phase noise in white light interference signals is reviewed. Particular attention is given to a series of studies carried out by our research group, including the establishment of a multi-source noise analysis framework that incorporates random perturbations, dispersion errors, and vibrations, as well as noise suppression strategies. Finally, future research directions are discussed, emphasizing the need for deeper investigations into the formation mechanisms of phase noise, phase response characteristics, and coupling with system parameters. Multi-source noise modeling, adaptive optimization, and deep learning techniques can be applied to the analysis and suppression of phase noise in white-light interference signals, thereby advancing precision measurement technologies.

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马龙, 李颖, 郝敬堂, 梁坤, 尹绪涛, 裴昕.白光干涉信号相位噪声分析与抑制方法研究[J].计测技术,2026,46(1):105~128:
10.11823/j. issn.1674-5795.2026.01.07.

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  • 在线发布日期: 2026-03-23
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