扫描隧道显微镜在原子级测量、表征与制造中的应用研究进展
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Research progress on applications of scanning tunneling microscope in atomic-scale measurement, characterization, and manufacturing
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    摘要:

    介绍了扫描隧道显微镜(Scanning Tunneling Microscope, STM)的基本工作原理,阐述了STM如何全面满足原子级制造中“看得到”“测得精”“造得出”三大核心需求,并分析了其在揭示量子现象与构筑人工原子结构方面的关键作用。指出STM的强环境适应性、超高空间分辨率、超高时间分辨率等特点,为揭示原子级制造中的新机制与新效应提供了关键实验依据;STM基于特有的量子隧穿效应可对制备结构的电学、磁学等物性参数进行精确测量,建立制造参数与器件性能之间的定量构效关系,从而为工艺优化与质量评估提供依据;将STM的原子级精准操纵能力与自动化、高通量技术模块深度融合是突破其效率瓶颈、迈向产业应用的核心路径,这一技术融合将推动原子制造从单一结构的精确制备,迈向复杂功能器件的高效、可控制造。提出未来需要进一步研究能够同时实现飞秒级时间分辨率与亚埃级空间分辨率的STM原位测量技术,并拓展复杂多物理场耦合下STM系统的综合物性表征能力,为下一代量子材料与信息器件的发展提供技术支撑。

    Abstract:

    This paper introduces the fundamental working principles of scanning tunneling microscope (STM), addresses how it comprehensively fulfills the three core requirements of atomic-scale manufacturing —— "visualization", "precision measurement" and "fabrication feasibility", and examines its pivotal role in revealing quantum phenomena and constructing artificial atomic structures. Studies highlight that STM's environmental adaptability, ultra-high spatial resolution, and ultra-high temporal resolution provide key experimental evidence for revealing novel mechanisms and effects in atomically precise manufacturing. STM, based on the unique quantum tunneling effect, performs precise measurements of physical properties (e.g., electronic and magnetic) in fabricated structures, and establishes quantitative structure-property relationships between fabrication parameters and device performance, thereby providing a critical basis for process optimization and quality assessment. The deep integration of STM atomic-scale manipulation capabilities with automated and high-throughput modules represents a critical strategy for breaking-through its efficiency bottleneck and propelling it into industrial applications. This technological convergence will propel atomic manufacturing from the precise fabrication of individual structures to the efficient and controllable manufacturing of complex functional devices. Future research needs to focus on developing in-situ STM measurement techniques that can simultaneously achieve femtosecond-level temporal resolution and sub-angstrom spatial resolution, as well as expanding the comprehensive physical property characterization capabilities of STM systems under complex multi-physical field coupling conditions, so as to provide technical support for the development of next-generation quantum materials and information devices.

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柴钰, 陈德樟, 李德志, 吕铠杭, 李昊鹏, 党超群, 居冰峰, 杨琛.扫描隧道显微镜在原子级测量、表征与制造中的应用研究进展[J].计测技术,2026,46(1):1~18:
10.11823/j. issn.1674-5795.2026.01.01.

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  • 在线发布日期: 2026-03-23
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