解决薄膜热电偶静态温度测试难题的箱式炉设计及应用研究
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Design and application of chamber furnace for solving thin-film thermocouple static temperature testing challenges
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    摘要:

    传统测试设备难以满足高温环境下薄膜热电偶的高精度、高效静态温度测试需求,针对此问题,研发了一款具有大空间及精准控温功能的箱式炉。炉体采用分体式多层结构设计,可灵活拆卸侧部隔热构件以消除安装遮挡,满足不同形状薄膜热电偶的测试需求。利用三段硅钼棒进行高效加热,结合水冷装置实现精准控温,产生稳定可靠的温场。基于ANSYS Workbench 2019R3软件建立三维热力学模型并进行仿真测试,结果显示:试样测量端温场及参考端温度符合设计预期。利用研制的箱式炉进行实际测试,结果显示:炉内测试坐标系中温度波动度为0.47 ℃ / 6 min,温场均匀性均优于3 ℃ / 50 mm,符合薄膜热电偶测试要求。利用该箱式炉开展Au-Pt薄膜热电偶测试,进一步验证了其应用有效性,为薄膜热电偶静态温度特性检测提供了重要技术保障。

    Abstract:

    Traditional test equipment struggles to meet the high-precision and efficient static temperature testing requirements of thin-film thermocouples in high-temperature environments. To address this issue, a chamber furnace with large-space and precise temperature control functions has been developed. The furnace body adopts a split-type multi-layer structure design. Its side thermal insulation components can be flexibly disassembled to eliminate installation obstructions, satisfying the testing needs of thin-film thermocouples with different shapes. High-efficiency heating is achieved using three-section molybdenum disilicide heating elements, combined with a water-cooling system to realize precise temperature control and generate a stable and reliable temperature field. A three-dimensional thermodynamic model was established and simulated using ANSYS Workbench 2019R3 software. The simulation results show that the temperature field at the measuring end and the temperature at the reference end of the sample meet the design expectations. Practical tests conducted with the developed box-type furnace indicate that the temperature fluctuation in the furnace's test coordinate system is 0.47 ℃ / 6 min, and the temperature field uniformity is better than 3 ℃ / 50 mm, which complies with the testing requirements for thin-film thermocouples. Tests on Au-Pt thin-film thermocouples were conducted using this box-type furnace, further verifying its application effectiveness. It provides important technical support for the static temperature characteristic detection of thin-film thermocouples.

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王一达, 田青云, 陈勇, 孔祥雪, 马可欣, 王素杰, 史继源.解决薄膜热电偶静态温度测试难题的箱式炉设计及应用研究[J].计测技术,2025,(6):153~160:
10.11823/j. issn.1674-5795.2025.06.13.

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  • 在线发布日期: 2026-01-05
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