Ni含量及薄膜厚度对PdNi氢传感器环境稳定性的影响研究
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Research on the influence of Ni content and film thickness on the environmental stability of PdNi hydrogen sensors
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    摘要:

    O2、H2O对PdNi薄膜的氢气敏感性有较大影响,为了实现对电解水制氢、核电站储存、深海能源勘探等含氧高湿度环境中氢气浓度的监测,采用磁控溅射法、光刻及等离子刻蚀等方法制备PdNi薄膜氢传感器。通过调控PdNi薄膜中Ni含量、厚度,系统研究在O2、H2O干扰下Ni含量及厚度对PdNi薄膜氢传感器稳定性的影响;利用XRD、SEM、XPS等分析测试方法分别对PdNi薄膜结晶度、元素含量、元素价态等进行表征。实验结果表明:随着Ni含量升高,PdNi薄膜对氢气的响应受H2O和O2的影响越大,而增加膜厚可降低干扰但会削弱响应灵敏度。其中,Ni含量8.04%,厚24 nm的PdNi薄膜氢传感器虽受O2和H2O影响,但其响应曲线能在经历干扰后恢复至初始状态。该研究成果为开发应用于复杂环境下的氢传感器提供了重要支撑。

    Abstract:

    O? and H?O significantly affect the hydrogen sensitivity of PdNi thin films. To monitor hydrogen concentration in high-humidity oxygen-containing environments such as electrolytic water hydrogen production, nuclear power plant storage, and deep-sea energy exploration, PdNi thin-film hydrogen sensors were fabricated using methods such as magnetron sputtering, photolithography, and plasma etching. By adjusting the Ni content and thickness of the PdNi thin films, the influence of Ni content and thickness on the stability of the PdNi thin-film hydrogen sensors under O? and H?O interference was systematically studied. Analytical methods such as XRD, SEM, and XPS were employed to characterize the crystallinity, elemental content, and elemental valence states of the PdNi thin films. The experimental results indicate that as the Ni content increases, the hydrogen response of the PdNi thin films becomes more affected by H?O and O?, while increasing the film thickness can reduce interference but weakens the hydrogen response sensitivity. Among them, the PdNi thin-film hydrogen sensor with a Ni content of 8.04% and a thickness of 24 nm, although affected by O? and H?O, can restore its response curve to the initial state after experiencing interference. This research provides important support for the development of the hydrogen sensor for applications under complex environment conditions.

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张羽, 杨宏伟, 刘方, 杨文刚, 蒋洪川, 邓新武. Ni含量及薄膜厚度对PdNi氢传感器环境稳定性的影响研究[J].计测技术,2025,(6):73~85:
10.11823/j. issn.1674-5795.2025.06.06.

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  • 在线发布日期: 2026-01-05
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