F-P干涉仪差分锁频系统研究
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Study on F-P interferometer differential frequency locking system
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    摘要:

    为解决法布里-珀罗(Fabry-Perot, F-P)干涉仪锁频方法响应速度、抗干扰能力、长期稳定性方面存在不足的问题,提出了F-P干涉仪差分锁频方案,将存在频差的双频激光耦合入F-P谐振腔,当激光频差足够小时,两光强信号曲线存在交叉,以两光强信号的差值作为被控量,在交叉点附近构建单调过零函数,作为闭环控制系统的反馈量,实现动态差分锁频控制。基于该方案,搭建了一套F-P干涉仪微位移测量装置并开展实验验证,结果表明该装置能够实现0 ~ 300 nm范围内的微位移测量,位移测量分辨力达到23 pm,验证了F-P干涉仪差分锁频方案的有效性,为推动微位移测量领域的发展提供了重要借鉴。

    Abstract:

    In order to solve the shortcomings of Fabry-Perot (F-P) interferometer frequency-locking method in terms of response speed, anti-interference ability and long-term stability, a differential frequency-locking scheme of F-P interferometer is proposed. Dual-frequency laser with frequency difference is coupled into F-P resonator. When the laser frequency difference is small enough, the signal curves of two light intensities will cross. Taking the difference between two light intensity signals as the controlled variable, a monotone zero crossing function is constructed near the crossing point, which is used as the feedback of the closed-loop control system to realize dynamic differential frequency locking control. Based on the scheme, a set of F-P interferometer micro-displacement measurement device was built and experimental verification was performed. The results show that the device could realize micro-displacement measurement in the range of 0 ~ 300 nm, and the displacement measurement resolution reached 23 pm, which verified the effectiveness of the F-P interferometer differential frequency-locking scheme, and provided an important reference for the development of micro-displacement measurement.

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杜含笑, 李乐言. F-P干涉仪差分锁频系统研究[J].计测技术,2023,(5)::
10.11823/j. issn.1674-5795.2023.05.08.

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  • 在线发布日期: 2023-12-06
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