Abstract:Multi-degree-of-freedom (multi-DOF) cross-scale precision displacement driving platform has a wide range of applications in optical metrology and detection, semiconductor manufacturing, biomedical engineering, and many other fields. In view of the heavy structure of the serial multi-DOF piezoelectric driving platform, a compact two-dimensional parallel cross-scale piezoelectric precision displacement driving platform is developed, which is based on the piezoelectric flexure hinge mechanism and impact driving principle. The results of finite element simulation and experimental test show that the piezoelectric flexure hinge stator has a static displacement of 7.95 μm and a natural frequency of 11.80 kHz. The low frequency step displacement and high frequency smooth movement tests show that the principle prototype has a step displacement resolution of 100 nm and a smooth movement speed of 4.96 mm/s. The load force reaches above 100 mN. The principle prototype meets the basic technical requirements of multi-DOF cross-scale precision displacement drive, and shows good application value in micro and nano optical detection systems.