Abstract:Silicon microcavity photonic temperature measurement includes International Temperature Scale (ITS) temperature measurement based on the thermo-refractive effect and thermodynamic temperature sensing based on optomechanical principle. In the 2018-2027 development strategy of the Consultive Committee of Temperature (CCT), silicon microcavity photonic thermometry was designated as the first priority within the emerging contact temperature measurement techniques. This paper briefly introduces the mechanisms of the two photonic temperature measurement techniques, and summarizes the research progress of metrology institutes and metrology organizations such as NIST in the United States and EURAMET in Europe in the above fields in recent years, as well as the exploratory research achievement from academia. Finally, the latest research results of the National Institute of Metrology, China are introduced including the fabrication and testing of self-developed photonic thermometers with a milli-Kelvin (mK) level resolution, the sub-mK level resolution enhancement approach by means of the Fano resonance, and the sub-mK level self-heating suppression by Si3N4 microcavity.