In order to meet the requirements of high-precision non-contact measurement of nano-scale topography specimen, a high-resolution optical microscope probe is developed. Taking the laser holographic unit as the light source and signal pickup device, and using the differential spot size change detection principle,we have established a micro-displacement measurement system. Combined with the optical microscope imaging system, a high-resolution optical microscope probe is implemented. The probe has been integrated in a nano three-dimensional measuring machine to carry out the measurement experiments of step height specimens and one-dimensional line spacing specimens. The results show that the optical microscope probe combined with the nano three-dimensional measuring machine can realize the traceable measurement of nano-scale topography specimens, and it has the advantages of fast scanning speed, high resolution, compact structure and non-contact measurement. The development work has important practical value in solving the problem of nano-scale topography measurement.