TP212
介绍了用粉末溅射做出的两种平面薄膜型酒敏元件的工艺、芯片结构和基本参数测试的结果.
The technics of two kinds of thin film gas sensors made by powder sputtering are introduced. The structure and the experimental results of basic parameters are given in this paper.
刘晓健,曲鲁,李东华,卫东,裘南畹.粉末溅射平面薄膜型SnO2/CeO2酒敏元件[J].计测技术,2006,26(Z1):71~74:[doi].
