氪气和氙气中四氟化碳杂质分析

氪气和氙气中四氟化碳杂质分析
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中图分类号:O659
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CF4 Impurity Analysis in Krypton Gas and Xenon Gas

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摘要:

介绍了CF4定性定量分析方法,探讨了CF4的来源及清除.

Abstract:

In this article, the qualitative and quantitative analysis of CF4 are introduced, as well as the source and elimination of CF4 are discussed.

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温舜德邓立新.氪气和氙气中四氟化碳杂质分析[J].计测技术,2005,25(5):17~18:
[doi].

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