Based on the previous experiment data and present investigation in dynamic strain measurement by applying FBG sensors, the application of FBG sensors to the micrometrology fields is presented in this paper. The dual measurement of strain and temperature is reviewed as an example to separate and eliminate the thermal disturbance. Dynamic strain caused Bragg wavelength shift demodulation device is summarized and the method to realize the very high demodulation resolution of Bragg wavelength shift is given.