Evaluation of Uncertainty of Measurement of Interferometer for Measuring First Grade Gauge Blocks up to 100mm Automatically
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摘要:
分析了100mm一等量块自动测量仪的误差来源,确定了测量量块的合成标准不确定度和扩展不确定度。
Abstract:
In this paper,the error surce of the interferometer for measuring first grade gauge blocks up to 100mm automatically is analyzed.The combined standard uncertainty and expanded uncertainty of this standard are evaluated.