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    Volume 45,2025 Issue 3
    • WANG Qin, ZHAO Duohan, CAO Lu, XU Shaofeng, LIU Jianing, LI Jian

      2025,45(3):7-27 ,DOI: 10.11823/j.issn.1674-5795.2025.03.01

      Abstract:

      The fundamental principles of single?photon imaging technology are introduced, along with an analysis of its advantages of high sensitivity, high temporal resolution and high photon utilization efficiency. The technical characteri?stics of single?point scanning and multi?pixel single?photon imaging are elaborated, with discussions on their applications in scenarios such as long?range imaging, underwater imaging, and imaging in complex environments. Principles of traditional single?photon imaging algorithms and deep learning?based algorithms are presented, followed by a comparative analysis of their application effects under conditions of sparse echoes, strong noise and multi?peak signals. The outlook for the future development of single?photon imaging technology is proposed, highlighting that innovative hardware systems, optimized imaging algorithms and interdisciplinary technology integration will further advance the field toward higher accuracy, efficiency and intelligence.

    • LYU Linjie, LI Duan, MI Qinggai, YANG Yang, ZHANG Lei, WU Tengfei, XU Lijun

      2025,45(3):28-36 ,DOI: 10.11823/j.issn.1674-5795.2025.03.02

      Abstract:

      To achieve fast and high?accuracy detection with single?photon light detection and ranging(LiDAR), this paper designs a high?flux and high?repetition?rate single?photon LiDAR system and proposes a waveform correction method tailored for this system. By increasing the photon counting rate, the system significantly reduces the single?pixel acquisition time. Meanwhile, the waveform correction method effectively addresses the issues of waveform distortion caused by the dead time of single?photon detectors under high?flux and high?repetition?rate conditions, thereby enhancing the inversion accuracy of target signal strength and depth. The system employs a free?running single?photon detector in the near?infrared band with a dead time of 1 200 ns and a laser repetition rate of 3 MHz, and the single?pixel acquisition time is set to 1 ms. Simulation and experimental results demonstrate that the proposed method achieves a distance inversion accuracy of 4.9 mm and a photon flux inversion accuracy of 0.16 photons. In the 3D imaging experiment, using a 50 × 50 point?to?point scanning pattern, the imaging plane fitting accuracy reaches 8 mm, enabling high?precision 3D imaging of small UAVs at close range. This study provides a new technical approach for the application of single?photon LiDAR in fast imaging fields such as target detection and resource mapping.

    • ZHAO Jinhui, HU Yuan

      2025,45(3):37-44 ,DOI: 10.11823/j.issn.1674-5795.2025.03.03

      Abstract:

      Aiming at the lack of more in?depth quantitative data for the study of the systematic errors of Littrow?type grating interferometers, the systematic errors of Littrow?type grating interferometers caused by the positioning accuracy of the components, namely, the systematic errors of the interferometers caused by the additional optical path differences due to grating rotation around the x, y, and z axes as well as mirror rotation around the y axis, were investigated in terms of the impact of the systematic errors on the displacement measurements of the interferometers. A mathematical model of the error caused by the change in optical path difference when the grating and mirror rotate around the axes was established, quantitatively analyzed, and the accuracy of the mathematical model was verified by experiments. The results show that: when the grating and mirror rotate around the x and z axes, no additional optical path difference is generated; when the grating rotates around the y axis, the systematic error will be generated and increase with the increase of the grating constant and the rotation angle; when the mirror rotates around the y axis, the error will be generated only when the rotation angles of the two mirrors are different, and the error will increase with the increase of the rotation angle of the two mirrors. After synthesizing the errors of the whole system, the undefined system error is ± 3.12 μm in high assembly level, and ± 17.75 μm in general level, which verifies the correctness of the theoretical simulation, and provides technical reference and theoretical support for the system design of the Littrow?type grating interferometer.

    • WANG Jiangping, ZHAO Chunbo, ZHANG Yu, MA Danni

      2025,45(3):45-57 ,DOI: 10.11823/j.issn.1674-5795.2025.03.04

      Abstract:

      In laser ranging scenarios involving non?cooperative targets, the complex and diverse surface characteristics of these targets often result in low reflectivity and scattering of reflected light in various directions. Consequently, the optical energy returning to the measurement system is weak. To effectively collect the return optical energy and achieve precise focusing of the laser spot under such conditions, a high?precision laser zoom optical?mechanical system and auto?focusing control system have been designed. The optical structure of the system is optimized by incorporating a combination of collimating lens group, front lens group, movable lens group, rear lens group, and compensating lens group. This design ensures efficient beam focusing and maximizes energy, thereby enhancing the signal?to?noise ratio and stability across different ranging distances. Additionally, the focusing consistency of the system is improved by optimizing optical axis stability and mechanical structure layout. In terms of control methodology, an image recognition?based auto?focusing strategy is introduced. A high?resolution camera captures real?time images of the target laser spot. Image processing techniques are employed to extract key features such as spot diameter, shape, and clarity. These features are used to dynamically calculate optimal focal length adjustment parameters, enabling automatic closed?loop focusing via a stepper motor. Experimental results indicate that the system has a light spot centroid offset of no more than 65 μm within a working distance of 0.5 ~ 30 m, which meets the design requirements and can effectively achieve spot focusing.

    • JIAO Shengsong, JIAO Jie, GAO Min, ZHENG Ling

      2025,45(3):58-69 ,DOI: 10.11823/j.issn.1674-5795.2025.03.05

      Abstract:

      To solve the measurement problem of stroke error for heavy?duty screw pairs with diameters of 100 ~ 300 mm in key industries, building upon the experience of small and medium?sized screw measurement instruments, this study has optimized the overall configuration, critical components, and measurement?control systems while exploring manufacturing and assembly processes. A specialized measurement machine for heavy?duty screw pairs was successfully developed, enabling dynamic measurement of both lead error in heavy?duty screws and travel error in screw pair assemblies. Experimental results demonstrate that within a 4 m travel range, the instrument's optical axis exhibits maximum indication errors of 0.5 μm and 1.3 μm when positioned at 50 mm and 150 mm from the screw centerline, respectively. For the tested screw pair samples, the maximum deviations between the extreme values of all measured parameters do not exceed one?third of the tolerance specified for P1?grade screw pairs. These findings confirm that the measurement accuracy of this heavy?duty screw pair stroke measuring machine meets P1?grade requirements. The successful development of this instrument plays an important role in promoting the development of heavy?duty screw pairs and screw detection fields.

    • WANG Hui, ZHAO Qichao, WANG Haoqi, SHAO Zhiqiang, XIAO Shuang, LIU Bin

      2025,45(3):70-77 ,DOI: 10.11823/j.issn.1674-5795.2025.03.06

      Abstract:

      To enhance the demodulation accuracy of vernier spectral signals in Fabry?Pérot (F?P) sensors, this study proposes a direct deep learning?based demodulation method for spectral data. The method involves preprocessing spectral data to convert complex vernier spectral information into formats compatible with Convolutional Neural Network (CNN), followed by training and testing deep learning models on the processed full?spectrum data. The CNN architecture was employed for feature extraction and classification of spectral data, enabling accurate demodulation of target signals. Experimental validation was conducted utilizing spectral data collected from a dual?cavity F?P sensor with 112.5 nm / MPa sensitivity. The results demonstrate that the CNN model achieved an average accuracy of 92.49% with 10?fold cross?validation, accompanied by a Root Mean Square Error (RMSE) of 0.039 2 MPa and a mean relative error of 3.31%. The hybrid Convolutional Neural Network?Long Short Term Memory (CNN?LSTM) model exhibited superior performance with an average accuracy of 96.98%, an RMSE of 0.039 0 MPa, and a mean relative error of 3.28%. Notably, the CNN?LSTM approach attained high precision using only 256 sampled data points, demonstrating remarkable efficiency. This method provides an effective technical pathway for advancing spectral signal demodulation technology, offering significant reference value for developing intelligent optical sensing systems.

    • SHI Youzhi, FENG Renjian, LI Xiaoting

      2025,45(3):78-84 ,DOI: 10.11823/j.issn.1674-5795.2025.03.07

      Abstract:

      To improve the identification accuracy of the static model of quartz flexible accelerometer, this study proposes a static model parameter identification method based on a Particle Swarm Optimization?Back Propagation (PSO?BP) neural network. This approach addresses the local optima susceptibility of Back Propagation (BP) neural networks through Particle Swarm Optimization (PSO) integration. The neural architecture is configured according to accelerometer input?output dimensions, where the PSO's global exploration capability optimizes the initial weight for the BP network. Precision centrifuge?based calibration experiments were conducted to validate the proposed method. Experimental results demonstrate that the PSO?BP neural network exhibits significantly enhanced capability in resolving nonlinear coefficients compared to the standard BP network, achieving a reduction of the mean squared error (MSE) by two orders of magnitude, which provides technical support for advancing the development of high?precision navigation technologies in airborne inertial navigation systems.

    • LIU Ren, WANG Jingjing, FENG Jijun

      2025,45(3):85-99 ,DOI: 10.11823/j.issn.1674-5795.2025.03.08

      Abstract:

      In response to the need for rapid and highly sensitive detection of tuberculosis antigens and novel coronavirus proteins, a highly?sensitivity optical microfiber sensor for detecting tuberculosis antigens (MPT64 protein, Ag85B protein) and the nucleocapsid (N) protein of severe acute respiratory syndrome coronavirus 2 (SARS?CoV?2) has been developed. The optical microfiber sensor is coated with graphene oxide (GO) which offers extremely high surface area and excellent optical properties, and can significantly enhance the conical optical fiber's immobilization capacity; the GO?coated conical optical fiber is further functionalized with single?stranded DNA (ssDNA) aptamers, enabling efficient capture of target proteins and facilitating real?time detection in vitro. The prepared sensor is employed to detect the target analytes. The experimental results reveal that the sensor can rapidly detect MPT64 and Ag85B in complex samples within 10 s, achieving detection limits of 4.23 × 10?2? M and 3.11 × 10?1? M, respectively. Additionally, the sensor exhibits a detection limit of 6.25 × 10?1? M for the N protein of SARS?CoV?2. The optical microfiber sensor possesses the advantages of high sensitivity and rapid detection, and is expected to play an important role in medical fields such as tuberculosis diagnosis and coronavirus detection.

    • FAN Zhe, YU Fengyuan, ZHAO Jianbo

      2025,45(3):100-110 ,DOI: 10.11823/j.issn.1674-5795.2025.03.09

      Abstract:

      The key technologies of low?altitude aircraft navigation are introduced, encompassing fundamental navigation techniques and comprehensive augmentation methodologies. A thorough analysis is conducted regarding the present state of navigation system testing technologies, with particular emphasis on the categorization and evaluation of various testing methodologies for critical navigation parameters. These include position?velocity measurement, heading determination, attitude assessment, and verification approaches for integrated enhancement technologies. It is pointed out that the test technology faces the deficiency in verification capabilities in two aspects: adaptability to complex scenarios and anti?interference ability, the lag between standardization and supervision, and the contradiction between test cost and scale, and it presents the trends of intelligence, standardization and globalization, scenario diversification, low?carbon and sustainability, which provides a reference for the further development of low?altitude aircraft navigation system test technology.

    • WANG Jingxing, CHEN Shilin, LI Yiming, WANG Li, SHI Wei, LIU Fang

      2025,45(3):111-122 ,DOI: 10.11823/j.issn.1674-5795.2025.03.10

      Abstract:

      To address the inefficiency, error?proneness, and safety risks associated with traditional manual meter reading for pressure instruments, as well as the limited adaptability of automated meter?reading technologies based on sensors and 3D vision, this study integrates computer vision and artificial intelligence technologies to develop a metering system that combines data acquisition, real?time monitoring, and data analysis. By improving the fast region?convolutional neural network(Fast R?CNN) algorithm through data augmentation and a lightweight feature extraction network, the system optimizes instrument positioning accuracy in complex environments. Additionally, the DeepLabv3+ model is enhanced by incorporating channel attention and spatial attention mechanisms, along with a hybrid loss function, to improve character segmentation efficiency. Experimental results demonstrate that the improved algorithm achieves an average positioning accuracy of 84% for instrument dial positioning and a mean Intersection over union of 78.6% for character segmentation in challenging industrial environments. Furthermore, the system reduces the time required for a single measurement by 85% compared to manual reading, confirming its high efficiency and strong adaptability. This research provides a scalable technical framework for intelligent monitoring of industrial equipment, offering the practical value for advancing digital and intelligent metering.

    • CHEN Chaoyong, WEI Yuanyuan, XING Shuai, TONG Zikang, WU Tengfei

      2025,45(3):123-132 ,DOI: 10.11823/j.issn.1674-5795.2025.03.11

      Abstract:

      In light of the challenges posed by the requirement of numerous parameters calibration, the involvement of multiple metrology specialties, and the inadequacies in existing calibration methods for coherent Doppler wind lidar. Considering the characteristics of laser wind measurement, such as non?contact, high spatiotemporal resolution and large detection range, the method of "feature analysis and multi?method integration" is adopted to break through the difficulties of quantitative evaluation of controversial parameters such as wind speed, wind direction, maximum measurement distance and detection blind zone. The advantages, disadvantages and applicable conditions of three different wind speed calibration methods, namely the wind speed calibrations using a calibration turntable, the radio frequency signal simulation of Doppler frequency shift and using a standard anemometer, are analyzed. Moreover, the calibration turntable wind speed calibration method was improved to enhance the data reliability of the wind speed parameter calibration. Aiming at the difficult problem of wind direction calibration, the calibration method under different scanning modes is presented dialectically to improve its universality. Based on specific measurement cases, the calibration results of wind speed and wind direction are given, and the uncertainty analysis of wind speed and wind direction parameters are performed, effectively illustrating the feasibility of the calibration method. The research results provide standardized technical support for the precise detection of wind fields in such fields as meteorological observation, aviation safety, and new energy, and have positive significance for promoting the development of atmospheric remote sensing metrology technology.

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    • Integrated manufacturing of thin film strain sensor on hydraulic pipeline surfaces

      LUO Guoxi, ZHANG Yuzhuo, JIA Zeng, LI Wenyan

      Abstract:

      Traditional strain gauges face challenges such as significant strain transfer errors and slow response time during monitoring, severely limiting the engineering effectiveness. To addresses the monitoring requirements for strain, vibration, and clamp looseness in aviation hydraulic pipelines, this paper proposed a design and manufacturing method for in-situ preparation of thin-film strain sensors on hydraulic pipelines. A finite element analysis model for strain transfer errors was established, and the structural parameters of the resistive strain grating were optimized. Multi-layer hetero-thin films, including the Ni80Cr20 strain-sensitive layer, were prepared using magnetron sputtering. Through a five-axis laser etching process, the laser incidence angle and focal position were adjusted, achieving a high-precision control over the etching depth. Testing revealed that the prepared thin-film strain sensor exhibited a drift rate (DR) of 8.4 × 10-5 / h, a temperature coefficient of resistance (TCR) of 1.3 × 10-4 / ℃ in the range of -40 ~ 100 ℃, a gauge factor (GF) of 2.03 in the range of 0 ~ 500 με, and a response time of just 15 ns. Force hammer experiments confirmed the sensor's ability to detect and identify key information such as strain, vibration, and clamp tightness. This integrated manufacturing sensor holds promising applications in the field of aviation hydraulic pipeline condition monitoring.

      • 1
    • Porous parameter inversion based on irregular sound incidence

      liao yunhong

      Abstract:

      Parameter inversion is an important means to obtain the material porous parameters, and the related principles and methods have been extensively investigated in recent years. The existing inversion researches are mainly based on the normal incidence acoustic model, while there is almost no investigation using irregular incidence sound model to invert porous parameters. This article studies the inversion method of porous materials under irregular sound incidence case. Here, the theoretical relationship was established between the porous parameter and irregular incidence absorption coefficient. The inversion study was conducted by using the established theoretical model, porous acoustic model and genetic algorithm, and the accuracy and astringency of inversed parameters was further analyzed. It's theoretically and numerically demonstrated that, the prediction and simulation results are in good agreement, and the inverted porous parameters by using irregular sound incidence model present high accuracy and astringency, which is expected to provide theoretical reference for porous parameter inversion analysis.

      • 1
    • Revisiting Discussion for Inherent Characteristics of Quantization Error from Digital-to-Analogue Conversion

      Lu Zuliang, Yang Yan, Zhang Zhonghua

      Abstract:

      To accurately achieve the desired phase angle during digital-to-analog conversion, a commonly used approach is to increase the conversion resolution. This method relies on finer amplitude-axis discretization to better approximate the original waveform. However, it comes with several disadvantages, such as high cost, slow conversion speed, and considerable power consumption. To address these limitations, this paper further explores a novel method—time-axis segmentation. A definition of quantization error is introduced, which includes both phase angle quantization error (PQE) and amplitude quantization error (AQE). Four essential conditions for the quantization process are presented. The paper also analyzes how the quantization error inherently varies with the phase angle. Simulation and experimental results are provided to validate the theoretical conclusions. The results show that the quantization errors exhibit a periodic distribution, with the error period being 1/N of the signal cycle, where N denotes the number of samples per signal cycle. Within each error period, the quantization errors are symmetrically distributed. Moreover, a series of zero-points of the phase angle quantization error is derived, which are independent of both the conversion resolution and the signal amplitude. By adjusting N to align these zero-points with the desired phase angle, new application opportunities arise. This study is expected to contribute to the advancement of phase angle standards and impedance bridge technology, and promote the use of high-speed, low-power, and cost-effective digital-to-analog converters.

      • 1
    • Design and Implementation of Six-Module Antenna Based on Wireless Telemetry System

      HUANG Zhengwei, SU Piqiang, GUO Jie, SU Xizhi, DONG Jing

      Abstract:

      A design method of a six-module transmitting/receiving antenna is proposed for the research of non-contact signal transmission of high-speed rotating parts in aero engines. The antenna is composed of six arc-shaped patches of different sizes. Its working frequency is 1.3GHz ~ 1.7GHz, and the working bandwidth is ≮40MHz. The transmittin/greceiving antenna model after packaging is established by using electromagnetic simulation software. The variation law of the S-parameters of the antenna with different packaging parameters is analyzed. Based on this, a set of remote measurement rotor/steller engineering application devices is formed. The experimental measurement results show that the working frequency and bandwidth of the antenna meet the design requirements. The low-speed debugging and high-speed rotation verification tests indicate that the formed telemetry device can simultaneously support six transmitter modules. With the conditions of the designed rotational speed ≤20,000 RPM and the ambient temperature ≮80℃, it can stably and effectively transmit signals, and the number of measurement points has doubled, which provides a technical basis for the dynamic stress test of components such as aeroengine compressors and turbines.

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    • 张志刚

      2022(6) ,DOI: 10.11823/j.issn.1674-5795.2022.06.02

      Abstract:

      With the development of femtosecond laser applications such as femtosecond optical comb spectroscopy and femtosecond ranging, there is a growing demand for femtosecond lasers with higher repetition rates. In this paper, the main technologies and technical progress of solid-state lasers and fiber lasers used to generate femtosecond pulses with GHz repetition rate are reviewed. Finally, the latest development trend of GHz lasers is summarized. It provides a reference for the relevant personnel who carry out the research on GHz repetition rate femtosecond lasers later.

    • 汤璐璐, 顾澄琳, 罗大平, 邓泽江, 潘海峰, 李文雪

      2023(3) ,DOI: 10.11823/j.issn.1674-5795.2023.03.02

      Abstract:

      Dual?comb spectroscopy (DCS) is an advanced precision spectral measurement tool with high resolution, high frequency accuracy, rapid measurement speed, and broad bandwidth. Thus, it has been widely used in many fields such as spectral lidar, greenhouse gas monitoring, and combustion diagnosis. As new principles, new schemes and new technologies of dual?comb spectroscopy are emerging, it is necessary to sort out and summarize their current development status. In this paper, the principles and technical performance indexes of dual?comb spectroscopy are introduced, and the experimental schemes and advantages of four typical DCS measurement systems are analyzed and compared, including optical frequency reference, electro?optical modulation, single?cavity dual?comb, and optical?optical modulation. Meanwhile, the development status of dual?comb spectroscopy in the expansion of the operating band is analyzed. Finally, the development trend and application prospects of DCS systems are summarized and prospected, which can provide a reference for further improvement of dual?comb spectroscopy in full?band spectral measurements and multi?scene applications.

    • CHEN Xuehua1, 2, 3, CONG Nan1, LUO Wenhao1, ZHANG Xiaonan1, WANG Yanhua1, WEI Xiaogang1, YANG Renfu1

      2023(4) ,DOI: 10.11823/j.issn.1674-5795.2023.04.06

      Abstract:

      This article summarizes the basic principles of electric field sensing technology based on Rydberg atoms, and analyzes the advantages of Rydberg atomic electric field measurement, such as high sensitivity, broadband, traceability to the International System of Units (SI), and high spatial resolution. The effects of laser parameters, detector noise, environmental electromagnetic interference, and other factors on the sensitivity and frequency response bandwidth of Rydberg atomic field strength measurement were discussed. Methods to improve the sensitivity of field strength measurement, such as frequency modulation, re pumping, and parameter optimization, were introduced, and methods to enhance the frequency response bandwidth of measurement, such as single auxiliary field atomic heterodyne method and double auxiliary five level heterodyne method, were elaborated. Explored the application of Rydberg atomic electric field sensing technology in metrology, communication, radar, imaging, and other fields, and pointed out that the sensitivity of Rydberg atomic electric field measurement should be further improved by optimizing the atomic gas chamber structure, designing high?performance photodetectors, and improving the performance of optical cavities; We should conduct in?depth research on the sources of uncertainty in the measurement of the Rydberg atomic electric field, and conduct comprehensive testing and characterization of the Rydberg atomic sensor; The miniaturization and engineering design research of the Rydberg atomic electric field measurement related devices should be carried out to further improve the practical application performance of the Rydberg atomic electric field measurement technology.

    • 吴岳松1, 2, 王子政1, 孙新磊1, 武飞宇1, 霍树春1, 3, 胡春光1

      2023(1) ,DOI: 10.11823/j.issn.1674-5795.2023.01.01

      Abstract:

      High aspect ratio hole/slot microstructures are now widely used in the fields of micro-electro-mechanical systems (MEMS) and three-dimensional integrated circuits (3D-IC), and are fundamental process structures for micro and nano devices. With the development need for miniaturization and functionalization of devices, the depth-to-width ratio of hole/slot microstructures is constantly increasing. As an important parameter, depth has a direct impact on the device processing and device performance. The accurate measurement of the depth of micro-hole/slot structure is of great significance, but the measurement method faces great challenges and has become one of the difficult problems in the field of measurement. To address this issue, the measurement methods are divided into two major categories according to the non-optical and optical measurement methods, and the working principles of measurement methods such as scanning electron microscopy, scanning probe technique, white light microscopic interferometry, confocal microscopy and reflection spectroscopy are introduced. The research status of the depth measurements of micro hole/slot is introduced, and the advantages and disadvantages of each measurement method are summarized. Finally, the future development trend and research focus of high aspect ratio microstructure depth measurement are discussed to help the future research of high aspect ratio microstructure depth measurements.

    • 王辰辰

      2021(2) ,DOI: 10.11823/j.issn.1674-5795.2021.02.06

      Abstract:

      The generation of residual stress and the influence on the performance of materials are summarized. The current measurement methods of residual stress are introduced. Their theory, application and features are analyzed, especially the methods of X-ray diffraction, neutron diffraction, nanoindentation and hole-drilling. The techniques of calibration for residual stress based on sample and instrument function are given. The importance of calibration for the residual stress measurement are emphasized. The future development of measurement and calibration methods on residual stress are prospected.

    • 胡源,侯禛敏*,蒋红梅

      2024(2) ,DOI: 10.11823/j.issn.1674-5795.2024.02.01

      Abstract:

      This paper makes a detailed introduction to the measurement principles of the optical surface absolute de? tection methods such as three?plane (spherical) mutual detection method, bispherical method, rotating average method, translational difference method (pseudo?shear interference method), parity function method, random ball method and rota? tion?translational method. It also describes the development status of absolute detection methods at home and abroad, and discusses the application fields of each absolute detection method and the corresponding technical limitations by compari? son. Then it makes prospects to the future trends of absolute detection technology from both physical implementation and algorithmic perspectives and proposes to increase the absolute detection accuracy of surface shape by improving the accu? racy of external mechanical structure. Finally, it analyzes the advantages of deep neural network algorithm and computa? tional optical imaging technology in the absolute detection process, and proposes that the absolute detection accuracy of optical surface shape can be further improved by combining the two technologies with the absolute detection methods. It can provide a useful reference for the research of absolute detection.

    • 赵莹,乔仁晓,郭鑫鑫,周坚俊

      2024(2) ,DOI: 10.11823/j.issn.1674-5795.2024.02.03

      Abstract:

      Elaborating on the definitions of coaxiality between mechanical structures, coaxiality between optical axes, and coaxiality between optical axes and mechanical axes. It introduces the principles and advantages and disadvan? tages of coaxiality measurement methods for mechanical structures, such as extensometer coaxiality measurement method, strain gauge coaxiality measurement method, dial gauge coaxiality measurement method, coordinate measuring machine coaxiality measurement method, laser alignment instrument method, etc; Analyzed the characteristics of optical axis coaxiality measurement methods such as interference comparison measurement, reflective centering measurement, and di? rect transmission measurement; This article introduces the principle and application of a coaxiality measurement method between optical and mechanical axes based on image processing and machine vision technology. It is pointed out that the measurement method for coaxiality between mechanical structures is relatively traditional, which has disadvantages such as low measurement efficiency and the need for human judgment; Coaxiality measurement technology will develop to? wards high precision, automation, and non?contact.

    • 马骏逸1, 2, 韩海年1, 3, 张子越1, 4, 魏志义1, 2, 3

      2022(5) ,DOI: 10.11823/j.issn.1674-5795.2022.05.01

      Abstract:

      The optical frequency comb (OFC) has experienced more than 20 years of rapid development since 1999. From the initial laboratory system to the widely used high-tech products, the optical frequency comb based on femtosecond laser has played an irreplaceable role in many frontier research fields, such as frequency metrology, ultrafast spectroscopy, optical frequency standards, generation of attosecond pulses, and multi-pulse time domain synthesis. Especially after the femtosecond Ti: sapphire laser frequency comb and the femtosecond fiber laser frequency comb, the all-solid-state femtosecond laser frequency comb directly pumped by diode laser has attracted the interest of many research groups and made a series of meaningful progress because it has the common advantages of low noise, high repetition rate, compact structure and high electro-optical efficiency. This review summarizes the development and typical applications of all-solid-state optical frequency combs, and looks forward to the future development of all-solid-state optical frequency combs based on the research results achieved by the authors research group, so as to provide reference for the development of all-solid-state femtosecond mode-locked oscillators.

    • 冯梁森1, 李维1, 陈少武2, 3, 武腾飞1, 李新良1

      2022(2) ,DOI: 10.11823/j.issn.1674-5795.2022.02.02

      Abstract:

      Microresonator frequency comb (MFC) is a tool for frequency measurement with high precision and integration potential. It will play a great role in deep space exploration and precise metrology. In this paper, the nonlinear optical generation and the device development of MFC are introduced. Especially, the status of application development of MFC including optical clock, range measurement, spectroscopy, optical-frequency synthesizer, low noise photonic microwave synthesis and coherent communication are elaborated. The future research hotspots and application prospects of optical frequency comb are predicted, which may promote the application development of optical frequency comb in metrology, measurement and communications.

    • 李小宽, 李维, 常海涛, 蔡静, 李新良

      2022(3) ,DOI: 10.11823/j.issn.1674-5795.2022.03.01

      Abstract:

      The 26th General Conference on Weights and Measures (CGPM) approved the redefinition of the International System of Units (SI) using fundamental constants. The temperature unit “Kelvin (K)” will be redefined using Boltzmann constant (k). Accurate measurement of Boltzmann constant is the key to redefining Kelvin and reproducing thermodynamic temperature. In this paper, four kinds of primary thermometers used for measuring Boltzmann constant are introduced in detail, namely acoustic gas thermometery (AGT), dielectric-constant gas thermometery (DCGT), Johnson noise thermometery (JNT) and Doppler broadening thermometery (DBT). The working principle, main parameters and practical application of the four primary thermometers are expounded, and their contributions to the revision of Boltzmann constant value is explained. Finally, the future development direction of the primary temperature measurement method is summarized and prospected, which provides research support for the reproduction and transfer of thermodynamic temperature.

    • 刘雪蓉,曹贺,张宝珍*

      2024(2) ,DOI: 10.11823/j.issn.1674-5795.2024.02.02

      Abstract:

      This article introduces the concept of structural health monitoring (SHM) technology and the principles of active and passive damage monitoring methods, and analyzes the current research status of structural health monitoring technology for aircraft both domestically and internationally. It elaborates on the monitoring principles and applications of advanced sensor technologies such as comparative vacuum monitoring (CVM) sensing technology, intelligent coating sen? sor technology, fiber optic sensing technology, piezoelectric sensor (PZT) technology, and wireless sensor network (WSN) in various types of equipment. Typical applications of SHM technology on the F-35 joint strike fighter (JSF) are pre? sented. It is pointed out that aircraft SHM technology is developing towards intelligence. In the future, it is necessary to fo? cus on the intelligent diagnosis technology of sensor networks, SHM technology in complex environments, health manage? ment technology based on SHM technology, health monitoring technology for intelligent materials or structures, and to ap? ply frontier technologies such as deep learning and digital twins to the aviation field to promote the development of air? craft structural health monitoring technology in China.

    • 孙安斌,曹铁泽,王继虎,甘晓川,高廷

      2021(2) ,DOI: 10.11823/j.issn.1674-5795.2021.02.04

      Abstract:

      The geometry measurement and control of large parts in the high-end equipment is the basis to ensure the quality of product delivery. The improvement of high-end equipment performance and productivity demands higher accuracy and efficiency for geometric dimension measurement. This paper introduces the working principles, typical instruments and application characteristics of six large-scale measurement technologies, including coordinate measurement, scanning measurement, attitude measurement, collaborative measurement, networking measurement and dynamic measurement, based on the measurement requirements of large-scale parts. The construction scheme and working characteristics of two special large-scale measurement systems, fixed measurement system and flexible measurement system, are analyzed. Furthermore, this paper summarizes the means and methods of laboratory calibration, on-site calibration and on-site verification of large-scale measurement system, and expounds the comprehensive development trend of large-scale, high precision, high efficiency, automation and intelligence of geometric dimension measurement of large-scale parts.

    • ZHANG Min1, 2, XIU Kunhao1, 2, SUN Jingyao1, 2, WANG Ziying1, 2, ZHAO Libin1, 2

      2024,44(3) ,DOI: 10.11823/j.issn.1674-5795.2024.03.05

      Abstract:

      The structural design and material selection of the piezoelectric layer, backing layer, matching layer, encapsulation layer, and interconnecting electrodes of flexible wearable piezoelectric ultrasound transducers are introduced, the advantages of the simulation design of the transducers using finite element analysis (FEA) technology are discussed, and key technologies in the transducers fabrication, such as electrode patterning, are described. The applications of this type of sensors in the fields of deep tissue imaging, haemodynamic monitoring, promoting the recovery of bone damage, and assisting transdermal drug delivery are analysed. The development direction of the sensors is outlooked, and it is pointed out that in the future, the measurement accuracy, safety and integration degree of flexible wearable piezoelectric ultrasound sensors can be further improved through the application of high?performance signal processing technology, improvement of ultrasound detection and imaging algorithm, and optimisation of the sensor structural design scheme, etc., so as to promote the marketable and industrial development of this kind of sensors.

    • 赵乂鋆,赵俭

      2021(6) ,DOI: 10.11823/j.issn.1674-5795.2021.06.02

      Abstract:

      Acoustic thermometry is widely used in daily life, medical research and industrial production, with great significance to broaden the application range of temperature measurement. In this paper, the acoustic thermometry methods are classified according to whether the sensitive element is in direct contact with the object to be measured. Also, this paper describes the basic principle, calculation formula and main parameters of ultrasonic internal thermometry, surface acoustic wave thermometry, sound-velocity thermometry and acoustic resonance thermometry respectively. Next, this paper introduces the main representative products, practical application and current application limitations of acoustic thermometry methods. By comparing and analyzing the precision problems and difficulties of acoustic thermometry methods, the conclusions and prospects are drawn, which can provide reference for further optimization and development of acoustic thermometry technology.

    • WEN Pengyu1, LONG Guilu1, 2, 3, WANG Min2

      2023(4) ,DOI: 10.11823/j.issn.1674-5795.2023.04.03

      Abstract:

      The applications of whispering?gallery?mode microcavities in sensing research, including displacement sensing, force sensing, acceleration sensing, mass sensing, nanoparticle sensing, temperature sensing, angular velocity sensing and exceptional points enhanced sensing, in recent years have been reviewed. The basic theory of different sensing schemes and some related important experimental work are introduced, and the important factors that may help improve sensing accuracy are illustrated, which will provide reference for the following theoretical and experimental research.

    • 刘雅丽, 李维, 李昱东, 李小宽, 冯梁森, 李新良

      2022(4) ,DOI: 10.11823/j.issn.1674-5795.2022.04.07

      Abstract:

      The preparation of chip scale atom vapor cells with high performance is one of the key technologies that urgently need to be solved in the development of chip scale quantum sensing instruments at present. In order to solve the problems of difficult quantitative filling of alkali metals and poor hermeticity in the preparation of chip scale atom vapor cells, the fabrication of the chip scale alkali atom vapor cells with high hermeticity was studied. The microelectromechanical system (MEMS) technology was used to realize the batch fabrication of chip scale atom vapor cells. The silicon cavity was prepared by deep silicon etching technology. The preparation and quantitative filling of alkali atoms were realized by photolysis of RbN3. The atom vapor cell was sealed by silicon wafer/glass bonding twice using the anodic bonding technology. Rb alkali metal atom vapor cells with N2 as buffer gas were successfully obtained . The bonding strength, hermeticity and absorption spectrum of the prepared atom vapor cell were tested. The results showed that the glass/silicon wafer/glass bonding strength of the atom vapor cell was high. The average leakage rate of the atom vapor cells in group B was 2.2×10-9 Pa?m3?s-1, which is the leading level in the industry currently. Finally, the reasons for the performance difference between the two groups of atom vapor cells were analyzed from the preparation processes, which lays an important foundation for promoting the development of chip scale integration technology of quantum sensing instruments.

    • 何小妹,刘峻峰,何学军,张学仪

      2021(2) ,DOI: 10.11823/j.issn.1674-5795.2021.02.05

      Abstract:

      The geometric parameters of aero-engine blades are defined and classified. Based on the importance of precise measurement of blade geometric parameters, the complexity of profile parameters measurement and the status quo of full parameter measurement and evaluation of blade geometric characteristics, the requirements of the construction of measurement and measurement guarantee system for aero-engine blade geometric parameters are introduced in detail. A test measurement guarantee system covering the parameters of aero-engine blade geometrical characteristics is proposed, and the connotation and architecture of the system are expounded, which can provide technical support for the construction of the integrated collaborative work platform for the digital design and manufacturing of aero-engine blade parts.

    • 彭泳卿,陈青松,戴保平

      2019,39(4) ,DOI: 10.11823/j.issn.1674-5795.2019.04.08

      Abstract:

      From the viewpoint of the development of the sensor technology, and based on the national demand to develop the sensor industrialization from the aerospace power strategy, the current advanced sensor technologies, such as pressure sensor, temperature and heat flux sensor, high precision MEMS gyroscope, gas sensor, optical fiber sensor and wireless passive sensor, were introduced, and the prospects of the future sensor technology development were given.

    • 李强, 任冬梅, 朱振宇, 李华丰, 王霁, 段小艳

      2023(1) ,DOI: 10.11823/j.issn.1674-5795.2023.01.08

      Abstract:

      Laser interferometer has the advantages of high measurement resolution and traceability of measurement results, and is increasingly widely used in nanometer measurement. The Michelson laser interferometers used in nano-measuring machine and linear expansion coefficient measuring device for low expansion materials, and the Fabry-Perot laser interferometer used in high-precision displacement measuring device are introduced in this paper. Combined with these typical applications , key problems in the interferometer optical system design, measurement environment control, the nonlinear error compensation of Michelson interferometer and the measurement range expansion of Fabry-Perot interferometer are analyzed and summarized. The principles and methods described in this paper are of great significance for the laser interferometer to achieve nanometer measurement accuracy, which can provide technical reference for the development of high-precision laser interferometer and wider applications of laser interferometers in nanometer measurements.

    • 黄向东1, 2, 孙壮1, 2, 段剑秋1, 2, 王伟波1, 2

      2023(1) ,DOI: 10.11823/j.issn.1674-5795.2023.01.04

      Abstract:

      Three-dimensional ultra-precision measurement technology plays a basic supporting role in improving high-end equipment manufacturing quality. With the progress of advanced manufacturing technology, improving measurement accuracy and expanding measurement range have become the key to the development of 3D ultra-precision measurement technology. In recent years, confocal 3D measurement technology has developed rapidly, and its application has gradually expanded from the biomedicine engineering to the manufacturing industry. This paper systematically introduces the research status and application progress of confocal measurement technology. The methods to improve the resolution of confocal 3D measurement and expand its measurement range are expounded from the perspective of technical principles. The relevant research results of interferometric confocal measurement, differential confocal measurement and spectral confocal measurement are compared and summarized. The application of confocal 3D measurement technology in surface profile measurement, microstructure feature size measurement and internal clearance measurement of key components are introduced in detail. On this basis, the future development direction of confocal 3D measurement technology is prospected with a view to providing technical reference for subsequent research.

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