液压管道曲面一体化成形制造的薄膜应变传感器
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西安交通大学 精密微纳制造技术全国重点实验室

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TP212

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Integrated manufacturing of thin film strain sensor on hydraulic pipeline surfaces
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State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an

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    摘要:

    传统应变片在监测过程中存在应变传递误差大、响应慢等问题,严重制约了工程应用效能。本文针对航空液压管道对应变、振动、卡箍松动等状态的实时监测需求,提出了一种在航空液压管道上原位制备薄膜应变传感器的设计与制造方法 。建立基底与应变丝栅敏感层之间的应变传递误差有限元分析模型,优化设计电阻应变栅的结构参数;采用磁控溅射制备Ni80Cr20应变敏感层等多层异质薄膜,通过五轴联动激光刻蚀工艺,实时调控激光入射角与焦点位置,实现对功能材料刻蚀深度的高精度控制。测试结果表明:在-40 ~ 100 ℃条件下,所制备的薄膜应变传感器电阻漂移率(Drift Rate, DR)为8.4 × 10-5 / h,电阻温度系数(Temperature Coefficient of Resistance, TCR)为1.3 × 10-4 / ℃;在0 ~ 500 με应变范围内,该传感器的应变灵敏系数(Gauge Factor, GF)为2.03 ,响应时间仅为15 ns。通过力锤实验等验证了该一体化制造传感器对航空液压管道实时应变、振动、卡箍松紧程度等关键信息的检测与识别能力,在航空液压管道状态监测领域具有应用前景。

    Abstract:

    Traditional strain gauges face challenges such as significant strain transfer errors and slow response time during monitoring, severely limiting the engineering effectiveness. To addresses the monitoring requirements for strain, vibration, and clamp looseness in aviation hydraulic pipelines, this paper proposed a design and manufacturing method for in-situ preparation of thin-film strain sensors on hydraulic pipelines. A finite element analysis model for strain transfer errors was established, and the structural parameters of the resistive strain grating were optimized. Multi-layer hetero-thin films, including the Ni80Cr20 strain-sensitive layer, were prepared using magnetron sputtering. Through a five-axis laser etching process, the laser incidence angle and focal position were adjusted, achieving a high-precision control over the etching depth. Testing revealed that the prepared thin-film strain sensor exhibited a drift rate (DR) of 8.4 × 10-5 / h, a temperature coefficient of resistance (TCR) of 1.3 × 10-4 / ℃ in the range of -40 ~ 100 ℃, a gauge factor (GF) of 2.03 in the range of 0 ~ 500 με, and a response time of just 15 ns. Force hammer experiments confirmed the sensor's ability to detect and identify key information such as strain, vibration, and clamp tightness. This integrated manufacturing sensor holds promising applications in the field of aviation hydraulic pipeline condition monitoring.

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  • 收稿日期:2025-06-23
  • 最后修改日期:2025-09-03
  • 录用日期:2025-09-04
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