Assembly is the key step for fabrication of high performance precision miniature devices or products, as the dimensions of the parts and their key structures are small, the assembly is inevitable to be sensor-based precision assembly. During assembly, the deviation of the position and orientation between the mating parts needs to be precisely measured, as well as the contact force or state to be controlled. Firstly, the sensors technology for assembly of miniature devices are briefly described, and then in combination of the application requirement of precision assembly of miniature devices, the vision sensor, the micro force senor, etc. and measurement technology are reviewed, precision measurement method and assembly control techniques are analyzed, aiming to provide reference value for the progress of precision assembly technology and development of assembly equipment.