基于CO2激光焊接的高温光纤压力传感器
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High Temperature Optical Fiber Pressure Sensor Based on CO2 Laser Welding
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    摘要:

    为了满足高温环境下的压力测量需求,研制了一种基于CO2激光焊接的高温F-P光纤压力传感器。介绍了MEMS压力敏感结构的制作过程,研究了传感器各组件之间的焊接工艺,实现了高温F-P光纤压力传感器的无胶化封装。在此基础上,对传感器的温度特性和高温压力性能进行了研究。结果表明,采用CO2激光焊接封装的传感器可靠性高,在高温下信号传输正常,未出现光谱能量衰减现象。在300 ℃高温下,传感器在0~2.5 MPa范围内的测量误差小于0.2 %FS,能够实现高温压力的准确测量。但温度对传感器的影响不可忽略,在实际应用过程中需对传感器进行温度补偿。

    Abstract:

    In order to meet the pressure measurement requirements in high temperature environments, a high temperature F-P(Fabry-Perot) optical fiber pressure sensor based on CO2 laser welding was developed. The manufacturing process of the MEMS(Micro Electro Mechanical Systems)pressure sensitive structure was introduced, the welding process between the sensor components was studied, and the no-adhesive packaging of the high temperature F-P optical fiber pressure sensor was achieved. On this basis, the temperature characteristics and high temperature pressure performance of the sensor were studied. The research results showed that the sensor packaged by CO2 laser welding has high reliability,and the sensor signal was transmitted normally at high temperature with no spectral energy attenuation phenomenon. In the environment of 300℃, the measurement error of the sensor in the pressure range of (0~2.5) MPa was less than 0.2% FS, which realized the accurate measurement of high temperature pressure. However, the influence of temperature on the sensor cannot be ignored, and the sensor needs to be temperature compensated in the application.

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张慧君, 隋广慧.基于CO2激光焊接的高温光纤压力传感器[J].计测技术,2021,(3)::
10.11823/j. issn.1674-5795.2021.03.06.

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  • 在线发布日期: 2021-06-28
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