Abstract:This paper attempts to apply confocal laser scanning microscope to the measurement of microvickers hardness indentation, which can not only obtain the three-dimensional shape of indentation, but also solve the problem that indentation less than 20 μm cannot be measured by using the characteristics of high-resolution of confocal measurement method. In this paper, the method,steps and examples of indentation measurement are given. The three-dimensional shape of the indentation can be used to characterize the accumulation of materials around the indenter during the pressing process, which can expand the scale of hardness measurement, and has a positive guiding significance for the next development of hardness measurement.