Abstract:In the vacuum heat treatment unit, the traditional quadrupole mass spectrometer (QMS) has the problem of inadequate residual gas detection due to structural defects, and the connector between the standard vacuum gauge and the vacuum gauge to be calibrated also has low vacuum detection efficiency due to structural problems, which leads to the inaccurate measurements of vacuum degree and residual gas in the large-capacity vacuum furnace. This article starts with TRIZ theory to make an asymmetric optimization of the structure of QMS, and transforms the T-shaped structure into a spherical structure and improves the heating and pressure control. The efficiency of vacuum heat treatment measuring device has been improved by the optimization and improvement.