Abstract:Large scale nano-measurement system requires the posture of samples to be stable during large scale scanning measurement. This means the sample’s posture should be adjustable. A posture variable one-dimension platform is provided in this paper. Four pivots driven by piezoceramics linear motors were used in the system to sustain the platform, and the connectors of pivots and platform are flexible. Under the control of four-axis simultaneous motion controller, four pivots rotate synchronously. When pivots are rotating at the same speed, the platform will be in translational move. And when the speeds are different, the posture will change. In this way, we got a platform whose range of movement is 40mm with a resolution of movement of 0.2 μm, and the range of posture is 0.1o with a resolution of rotation of 0. 1".