This paper summarizes the structures and performance parameters of various Micro flow sensors based on MEMS technology. The possible development direction of micro flow measurement technique is inferred according to international popular research, which is the combination of two or more approaches with complementary advantages, aiming to improve the measurement accuracy and expand the range ratio. Finally, the integrated method of Coriolis effect and pressure loss effect is proposed based on existing technology. The operating principle and theoretical basis of the sensor are described to verify the feasibility of the approach.