Research status of control technologies for multi⁃DOF piezoelectric nano⁃positioning platform
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    Abstract:

    This paper makes a concise overview of the working principle of piezoelectric drive, the nonlinearity characteristics of the piezoelectric materials, and the direct driving method of piezoelectric positioning platforms. It summarizes the structural design and decoupling optimization methods of multi?degree?of?freedom piezoelectric positioning platforms based on three driving schemes: series, parallel, and series?parallel. It focuses on the analysis of the cross?coupling and the nonlinear characteristics of the piezoelectric driver that need to be addressed in the control system of multi?degree?of?freedom nano piezoelectric positioning platforms. It is proposed that appropriate control strategies should be selected according to the different structures and motion modes of multi?degree?of?freedom piezoelectric positioning platforms. Finally, it summarizes the control algorithms suitable for multi?degree?of?freedom piezoelectric positioning platforms. It is helpful for researchers to understand the latest developments in the field of piezoelectric nano positioning platforms and serves as a valuable reference for research on control technology for piezoelectric nano positioning platforms.

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  • Online: January 31,2024
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