The machining accuracy of machine tools and the measuring accuracy of measurement instruments are significantly influenced by the positioning accuracy of linear stages, which are the basic components of the machine tool and the measurement instrument. Since there are the manufacturing error and the assemble error, the linear stage exists six-degree-of-freedom geometric motion errors, which will affect its positioning accuracy. It is essential to measure the geometric motion errors for compensating the positioning errors of the linear stage induced by the geometric motion errors. The traditional measurement method can only measure a single error element, which is time-consuming. In addition, the size of the traditional measurement instrument is bulky and cannot realize on-line geometric motion errors measurement. Therefore, a series of compact and low-cost multi-degree-of-freedom geometric motion errors measurement method are proposed in this paper. The degree-of-freedom of the measurement system can be selected according to the requirement of the measurement. The measurement systems can not only realize high-precision measurement, but also achieve on-line measurement. Multi-degree-of-freedom geometric motion errors measurement methods play an important role in improving the motion accuracy of linear stages.